Problem epi2 SNF 2008-01-31 19:36:26: temperature problem

ehe at snf.stanford.edu ehe at snf.stanford.edu
Thu Jan 31 19:36:26 PST 2008


Could not run my recipes - temperatures would not stay near set point. For example, in a recipe that doesn't have any steps above 500C, after a stabilization step, upper chamber deviated to 624C while lower chamber was at 496C, causing recipe to abort.




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