Shutdown epi2 SNF 2008-01-31 19:51:30: bad temperature control

ehe at snf.stanford.edu ehe at snf.stanford.edu
Thu Jan 31 19:51:30 PST 2008


Each time I tried, my recipe aborted due to temperature out of range. I tried increasing the stabilization step to >5minutes, that didn't help. For example, after long 500C stabilization step, during 500C deposition the upper chamber temperature reached 624C with lower chamber temperature still ~500C. None of my recipes could run either due to low or high temperatures out of range.




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