From mdickey at snf.stanford.edu Tue Jul 1 09:40:44 2008 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 1 Jul 2008 09:40:44 -0700 Subject: Comment epi2 SNF 2008-07-01 09:40:43: Silane Message-ID: Changing Silane bottle. No Silane available at this time From mdickey at snf.stanford.edu Tue Jul 1 13:49:21 2008 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 1 Jul 2008 13:49:21 -0700 Subject: Problem epi2 SNF 2008-07-01 13:49:21: No Silane Message-ID: The pigtail for the silane bottle was found to have a leak. Looking into a replacement. No timetable as of yet. No silane available for the tool. From slcheng at snf.stanford.edu Tue Jul 1 20:29:28 2008 From: slcheng at snf.stanford.edu (slcheng at snf.stanford.edu) Date: Tue, 1 Jul 2008 20:29:28 -0700 Subject: Problem epi2 SNF 2008-07-01 20:29:27: System in Isolated mode Message-ID: I accidently hit the offline. For some reason, the system show an error message and went into the isolated mode.Therefore. I can't make it back to online. From ofidaner at snf.stanford.edu Wed Jul 2 00:49:14 2008 From: ofidaner at snf.stanford.edu (ofidaner at snf.stanford.edu) Date: Wed, 2 Jul 2008 00:49:14 -0700 Subject: Problem epi2 SNF 2008-07-02 00:49:14: ChA cannot go to online Message-ID: It says main H2 supply pressure at 28.6 psi is above max 28 psi required. From maurice at snf.stanford.edu Wed Jul 2 10:07:44 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 2 Jul 2008 10:07:44 -0700 Subject: Problem epi2 SNF 2008-07-02 00:49:14: ChA cannot go to online Message-ID: Homed PCV From maurice at snf.stanford.edu Wed Jul 2 10:07:57 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 2 Jul 2008 10:07:57 -0700 Subject: Problem epi2 SNF 2008-07-01 20:29:27: System in Isolated mode Message-ID: Homed PCV From maurice at snf.stanford.edu Wed Jul 2 10:08:42 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 2 Jul 2008 10:08:42 -0700 Subject: Problem epi2 SNF 2008-06-16 18:27:38: error message Message-ID: Modified user recipe so that temp didn't overshoot target From maurice at snf.stanford.edu Wed Jul 2 10:09:19 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 2 Jul 2008 10:09:19 -0700 Subject: Problem epi2 SNF 2008-05-29 23:46:31: clean recipe failure Message-ID: Have not had this issue since May From maurice at snf.stanford.edu Wed Jul 2 10:11:03 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 2 Jul 2008 10:11:03 -0700 Subject: Problem epi2 SNF 2008-06-02 01:49:09: dop2 deviation error Message-ID: Spoke to user about limitations of trying to use an MFC at the lower 2% of the MFCs range From renshen at snf.stanford.edu Wed Jul 2 22:40:09 2008 From: renshen at snf.stanford.edu (renshen at snf.stanford.edu) Date: Wed, 2 Jul 2008 22:40:09 -0700 Subject: Problem epi2 SNF 2008-07-02 22:40:08: SiH4 not flowing Message-ID: It was OK for my first wafer. Then during my second wafer, SiH4 cannot switch on any more. The actual flow indicates to be "N/F" and the recipe shuts down accordingly. From skoh at snf.stanford.edu Sat Jul 5 17:46:03 2008 From: skoh at snf.stanford.edu (skoh at snf.stanford.edu) Date: Sat, 5 Jul 2008 17:46:03 -0700 Subject: Problem epi2 SNF 2008-07-05 17:46:03: Pressure Deviation fault Message-ID: Had pressure deviation warnings on recipes that did not used to have any problems. Had one pressure deviation fault during a cooldown step, which caused the chamber to go offline. Managed to bring the system back online and run the same recipe later. From maurice at snf.stanford.edu Mon Jul 7 13:51:42 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 7 Jul 2008 13:51:42 -0700 Subject: Problem epi2 SNF 2008-07-05 17:46:03: Pressure Deviation fault Message-ID: User ran recipe again and had no problem From maurice at snf.stanford.edu Mon Jul 7 13:52:54 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 7 Jul 2008 13:52:54 -0700 Subject: Problem epi2 SNF 2008-07-02 22:40:08: SiH4 not flowing Message-ID: Coral already has a not stating that solane is not available. From maurice at snf.stanford.edu Mon Jul 7 13:53:27 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 7 Jul 2008 13:53:27 -0700 Subject: Comment epi2 SNF 2008-05-16 17:38:22: DCS look ok Message-ID: archive From maurice at snf.stanford.edu Mon Jul 7 13:53:41 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 7 Jul 2008 13:53:41 -0700 Subject: Comment epi2 SNF 2008-05-19 16:55:06: modified etch recipes Message-ID: archive From maurice at snf.stanford.edu Mon Jul 7 13:53:55 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 7 Jul 2008 13:53:55 -0700 Subject: Comment epi2 SNF 2008-05-30 11:24:28: Repaired HCl purge valve Message-ID: archive From mdickey at snf.stanford.edu Tue Jul 8 13:54:53 2008 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 8 Jul 2008 13:54:53 -0700 Subject: Problem epi2 SNF 2008-07-01 13:49:21: No Silane Message-ID: Old silane bottle with 50 lbs back on line. New bottle had a leak. Replacement is on order. We may or may not have enough until it arrives. Will update coral on bottle pressure. From mdickey at snf.stanford.edu Tue Jul 8 13:55:08 2008 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 8 Jul 2008 13:55:08 -0700 Subject: Comment epi2 SNF 2008-07-01 09:40:43: Silane Message-ID: Silane back on line From masaharu at snf.stanford.edu Wed Jul 9 04:48:49 2008 From: masaharu at snf.stanford.edu (masaharu at snf.stanford.edu) Date: Wed, 9 Jul 2008 04:48:49 -0700 Subject: Problem epi2 SNF 2008-07-09 04:48:48: fail GE-ETCH-COAT x2 Message-ID: I failed to run GE-ETCH-COAT twice. In both times, temperature was not able to ramp up in step2. From masaharu at snf.stanford.edu Wed Jul 9 04:57:55 2008 From: masaharu at snf.stanford.edu (masaharu at snf.stanford.edu) Date: Wed, 9 Jul 2008 04:57:55 -0700 Subject: Problem epi2 SNF 2008-07-09 04:57:54: fail ETCHCOAT-CHA and system is now in offline Message-ID: I also failed to run ETCHCOAT-CHA and saw "OVERTEMP ERROR". Now the system is in offline. I cannot recover from this situation. Although I leave epi2 yellow, I believe there is some problem in temperature control. From eenriquez at snf.stanford.edu Wed Jul 9 12:10:56 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 9 Jul 2008 12:10:56 -0700 Subject: Shutdown epi2 SNF 2008-07-09 12:10:55: Over temp fault Message-ID: Unable to clear the over temperature fault. From eenriquez at snf.stanford.edu Wed Jul 9 19:19:27 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 9 Jul 2008 19:19:27 -0700 Subject: Comment epi2 SNF 2008-07-09 19:19:26: Update Message-ID: Reset an overtemp switch inside the upper lamp housing. Ran Ch.A etch coat recipe 3 times. First time it faulted for the pressure being too high, the second time the process faulted for "temperature at max power for max time". The third time there were no faults. I ran the "Big Etch" recipe 2 times and both times it faulted for over pressure. Found the pumps went Offline both times. I ran the Ge etch coat recipe 1 time with no problems. Will troubleshoot further tomorrow. From eenriquez at snf.stanford.edu Thu Jul 10 09:26:43 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 10 Jul 2008 09:26:43 -0700 Subject: Shutdown epi2 SNF 2008-07-10 09:26:42: Down for facility water Message-ID: From maurice at snf.stanford.edu Thu Jul 10 13:59:48 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 10 Jul 2008 13:59:48 -0700 Subject: Shutdown epi2 SNF 2008-07-10 09:26:42: Down for facility water Message-ID: Cooling water back on From eenriquez at snf.stanford.edu Thu Jul 10 14:30:30 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 10 Jul 2008 14:30:30 -0700 Subject: Problem epi2 SNF 2008-07-09 04:48:48: fail GE-ETCH-COAT x2 Message-ID: Ran GE etch coat with no problems. From eenriquez at snf.stanford.edu Thu Jul 10 14:30:57 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 10 Jul 2008 14:30:57 -0700 Subject: Shutdown epi2 SNF 2008-07-09 12:10:55: Over temp fault Message-ID: Reset overtemp switch inside the upper lamp housing From maurice at snf.stanford.edu Thu Jul 10 14:36:26 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 10 Jul 2008 14:36:26 -0700 Subject: Problem epi2 SNF 2008-07-09 04:57:54: fail ETCHCOAT-CHA and system is now in offline Message-ID: Elmer reset overtemp switch From eenriquez at snf.stanford.edu Thu Jul 10 14:37:25 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 10 Jul 2008 14:37:25 -0700 Subject: Comment epi2 SNF 2008-07-09 19:19:26: Update Message-ID: Ran Ge-etchcoat and etchcoat Ch.A with no problems. From maurice at snf.stanford.edu Thu Jul 10 16:09:26 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 10 Jul 2008 16:09:26 -0700 Subject: Shutdown epi2 SNF 2008-07-10 16:09:26: SiC-coating meted on susceptor Message-ID: From maurice at snf.stanford.edu Thu Jul 10 16:12:39 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 10 Jul 2008 16:12:39 -0700 Subject: Shutdown epi2 SNF 2008-07-10 16:12:38: SiC-coating melted on susceptor Message-ID: coating melted and pitted lift pins flaking susceptor is not centered or level From maurice at snf.stanford.edu Fri Jul 11 14:46:37 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 11 Jul 2008 14:46:37 -0700 Subject: Shutdown epi2 SNF 2008-07-11 14:46:35: low water flow Message-ID: From eenriquez at snf.stanford.edu Fri Jul 11 15:15:30 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jul 2008 15:15:30 -0700 Subject: Comment epi2 SNF 2008-07-11 15:15:28: Update Message-ID: We do not have the susceptor in stock. The vendor (Applied Materials) does not sell this part anymore because it has been discontinued. Ted has contacted an Applied Materials sanctioned second source vendor but they said that they would still need to obtain Applied's permission in order to contact the susceptor's manufacturer. Should have an update early next week. From maurice at snf.stanford.edu Mon Jul 14 11:16:48 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 14 Jul 2008 11:16:48 -0700 Subject: Shutdown epi2 SNF 2008-07-11 14:46:35: low water flow Message-ID: reconnected quick disconnect to upper pyrometer From eenriquez at snf.stanford.edu Fri Jul 18 15:17:06 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 18 Jul 2008 15:17:06 -0700 Subject: Comment epi2 SNF 2008-07-18 15:17:05: Update Message-ID: No update on the ETA of new susceptor. Ted should have an update on Monday. When we opened the chamber to recenter the susceptor, we found that the pin lift quartz had broken. currently cleaning the chamber, trying to remove all the broken quartz pieces out of the lift shaft well. The chamber should be ready for further HCl cleans by 3 pm on Monday. From mdickey at snf.stanford.edu Tue Jul 22 14:11:55 2008 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 22 Jul 2008 14:11:55 -0700 Subject: Comment epi2 SNF 2008-07-22 14:11:54: HCL cleans Message-ID: System is back together. Quartzware cleaned and replaced. Currently running the BIG ETCH recipe. Will need to run some more cleans to see if this cleans up the susceptor. No update on the replacement aas of yet. From eenriquez at snf.stanford.edu Wed Jul 23 10:36:57 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 23 Jul 2008 10:36:57 -0700 Subject: Comment epi2 SNF 2008-07-11 15:15:28: Update Message-ID: Archived From eenriquez at snf.stanford.edu Wed Jul 23 10:37:05 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 23 Jul 2008 10:37:05 -0700 Subject: Comment epi2 SNF 2008-07-18 15:17:05: Update Message-ID: Archived From eenriquez at snf.stanford.edu Wed Jul 23 10:54:43 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 23 Jul 2008 10:54:43 -0700 Subject: Shutdown epi2 SNF 2008-07-10 16:12:38: SiC-coating melted on susceptor Message-ID: Replaced broken pin lifter quartz assembly and the susceptor support shaft (deformed from the heat). Also replaced all the lift pins. Reinstalled the old, coated susceptor. Consensus is to try to clean the susceptor insitu by running the Big Etch recipe many times. From eenriquez at snf.stanford.edu Wed Jul 23 10:54:52 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 23 Jul 2008 10:54:52 -0700 Subject: Shutdown epi2 SNF 2008-07-10 16:09:26: SiC-coating meted on susceptor Message-ID: Replaced broken pin lifter quartz assembly and the susceptor support shaft (deformed from the heat). Also replaced all the lift pins. Reinstalled the old, coated susceptor. Consensus is to try to clean the susceptor insitu by running the Big Etch recipe many times. From eenriquez at snf.stanford.edu Wed Jul 23 10:55:29 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 23 Jul 2008 10:55:29 -0700 Subject: Comment epi2 SNF 2008-07-22 14:11:54: HCL cleans Message-ID: Archived From eenriquez at snf.stanford.edu Wed Jul 23 10:58:31 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 23 Jul 2008 10:58:31 -0700 Subject: Shutdown epi2 SNF 2008-07-23 10:58:31: Susceptor is coated Message-ID: Running HCl cleans (Big Etch) to try to clean up the coated susceptor. So far, the wafer pocket area of the suceptor is ~ 10 % clean. From maurice at snf.stanford.edu Thu Jul 24 16:59:45 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 24 Jul 2008 16:59:45 -0700 Subject: Shutdown epi2 SNF 2008-07-23 10:58:31: Susceptor is coated Message-ID: Susceptor is 100% clear. There is a pinhole in center on wafer pocket. From maurice at snf.stanford.edu Thu Jul 24 17:03:00 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 24 Jul 2008 17:03:00 -0700 Subject: Shutdown epi2 SNF 2008-07-24 17:03:00: Wafer hadling error Message-ID: System shutdown while loading a wafer for a test. Wait for maint to recover wafer! From eenriquez at snf.stanford.edu Fri Jul 25 12:05:14 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 25 Jul 2008 12:05:14 -0700 Subject: Comment epi2 SNF 2008-07-25 12:05:13: Update Message-ID: Wafer lift is not going to the lift position. It looks like there is an interlock that needs to be made because the lifter cylinder does not even attempt to go to the lift position. Ted has tried to contact Applied Materials to see if we could get some help. From eenriquez at snf.stanford.edu Tue Jul 29 13:37:34 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 29 Jul 2008 13:37:34 -0700 Subject: Shutdown epi2 SNF 2008-07-24 17:03:00: Wafer hadling error Message-ID: Field service releveled the susceptor ,adjusted the susceptor height and lift speed. They also adjusted the wafer hand-off position. From eenriquez at snf.stanford.edu Tue Jul 29 13:37:49 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 29 Jul 2008 13:37:49 -0700 Subject: Comment epi2 SNF 2008-07-25 12:05:13: Update Message-ID: Archived From maurice at snf.stanford.edu Tue Jul 29 17:03:31 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 29 Jul 2008 17:03:31 -0700 Subject: Shutdown epi2 SNF 2008-07-29 17:03:31: Testing Message-ID: Running wafers to see if processes have drifted, wafers are haze free, backsides are clean and we have now overtemp problems. Hyun-Yong Yu is running Ge test. He will report on result. Tool may be up in the morning. From maurice at snf.stanford.edu Wed Jul 30 11:12:49 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 30 Jul 2008 11:12:49 -0700 Subject: Shutdown epi2 SNF 2008-07-29 17:03:31: Testing Message-ID: About 10 wafers have been processed through the system. The haze that we saw on the first wafers has cleared up (as we expected). Hyun-Yong reports that he saw particles on all the wafers but it seems to become less as more wafers are run. The susceptor height was adjusted by Elmer and AMAT field service to fix wafer handling issues...this may change the gas flow across the wafer...this may change your processes. I suggest you run tests to re characterize your process before committing "good wafers". -m From maurice at snf.stanford.edu Wed Jul 30 16:26:23 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 30 Jul 2008 16:26:23 -0700 Subject: Shutdown epi2 SNF 2008-07-30 16:26:23: Running wafers to clear up particles Message-ID: The particles are getting better (fewer) with each run. We will set the machine to run 15 wafers tonight and inspect them in the morning.