Problem epi2 SNF 2008-07-02 22:40:08: SiH4 not flowing

renshen at renshen at
Wed Jul 2 22:40:09 PDT 2008

It was OK for my first wafer. Then during my second wafer, SiH4 cannot switch on any more. The actual flow indicates to be "N/F" and the recipe shuts down accordingly.

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