Problem epi2 SNF 2008-07-02 22:40:08: SiH4 not flowing

renshen at snf.stanford.edu renshen at snf.stanford.edu
Wed Jul 2 22:40:09 PDT 2008


It was OK for my first wafer. Then during my second wafer, SiH4 cannot switch on any more. The actual flow indicates to be "N/F" and the recipe shuts down accordingly.




More information about the epi2-pcs mailing list