Problem epi2 SNF 2008-07-05 17:46:03: Pressure Deviation fault

skoh at snf.stanford.edu skoh at snf.stanford.edu
Sat Jul 5 17:46:03 PDT 2008


Had pressure deviation warnings on recipes that did not used to have any problems.  Had one pressure deviation fault during a cooldown step, which caused the chamber to go offline.  Managed to bring the system back online and run the same recipe later.




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