Problem epi2 SNF 2008-07-02 22:40:08: SiH4 not flowing
maurice at snf.stanford.edu
maurice at snf.stanford.edu
Mon Jul 7 13:52:54 PDT 2008
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Problem epi2 SNF 2008-07-02 22:40:08: SiH4 not flowing
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Problem epi2 SNF 2008-07-05 17:46:03: Pressure Deviation fault
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Coral already has a not stating that solane is not available.
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Problem epi2 SNF 2008-07-02 22:40:08: SiH4 not flowing
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Problem epi2 SNF 2008-07-05 17:46:03: Pressure Deviation fault
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