Comment epi2 SNF 2008-05-19 16:55:06: modified etch recipes
maurice at snf.stanford.edu
maurice at snf.stanford.edu
Mon Jul 7 13:53:41 PDT 2008
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Comment epi2 SNF 2008-05-16 17:38:22: DCS look ok
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Comment epi2 SNF 2008-05-30 11:24:28: Repaired HCl purge valve
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