Problem epi2 SNF 2008-07-09 04:48:48: fail GE-ETCH-COAT x2

masaharu at snf.stanford.edu masaharu at snf.stanford.edu
Wed Jul 9 04:48:49 PDT 2008


I failed to run GE-ETCH-COAT twice.
In both times, temperature was not able to ramp up in
step2.




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