Shutdown epi2 SNF 2008-07-10 09:26:42: Down for facility water
maurice at snf.stanford.edu
maurice at snf.stanford.edu
Thu Jul 10 13:59:48 PDT 2008
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Shutdown epi2 SNF 2008-07-10 09:26:42: Down for facility water
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Shutdown epi2 SNF 2008-07-10 16:09:26: SiC-coating meted on susceptor
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Cooling water back on
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Shutdown epi2 SNF 2008-07-10 09:26:42: Down for facility water
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Shutdown epi2 SNF 2008-07-10 16:09:26: SiC-coating meted on susceptor
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