Comment epi2 SNF 2008-07-18 15:17:05: Update

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Fri Jul 18 15:17:06 PDT 2008


No update on the ETA of new susceptor.  Ted should have an update on Monday. When we opened the chamber to recenter the susceptor, we found that the pin lift quartz had broken.  currently cleaning the chamber, trying to remove all the broken quartz pieces out of the lift shaft well.  The chamber should be ready for further HCl cleans by 3 pm on Monday.  




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