Comment epi2 SNF 2008-07-22 14:11:54: HCL cleans

mdickey at snf.stanford.edu mdickey at snf.stanford.edu
Tue Jul 22 14:11:55 PDT 2008


System is back together. Quartzware cleaned and replaced.
Currently running the BIG ETCH recipe. Will need to run
some more cleans to see if this cleans up the susceptor. No 
update on the replacement aas of yet.




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