Shutdown epi2 SNF 2008-07-10 16:09:26: SiC-coating meted on susceptor

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Jul 23 10:54:52 PDT 2008


Replaced broken pin lifter quartz assembly and the susceptor support shaft (deformed from the heat).  Also replaced all the lift pins.  Reinstalled  the old, coated susceptor.  Consensus is to try to clean the susceptor insitu by running the Big Etch recipe many times.




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