Shutdown epi2 SNF 2008-07-23 10:58:31: Susceptor is coated

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Jul 23 10:58:31 PDT 2008


Running HCl cleans (Big Etch) to try to clean up the coated susceptor.  So far, the wafer pocket area of the suceptor is ~ 10 % clean.




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