Comment epi2 SNF 2008-07-25 12:05:13: Update

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Fri Jul 25 12:05:14 PDT 2008


Wafer lift is not going to the lift position.  It looks like there is an interlock that needs to be made because the lifter cylinder does not even attempt to go to the lift position.  Ted has tried to contact Applied Materials to see if we could get some help.  




More information about the epi2-pcs mailing list