Shutdown epi2 SNF 2008-07-24 17:03:00: Wafer hadling error

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue Jul 29 13:37:34 PDT 2008


Field service releveled the susceptor ,adjusted the susceptor height and lift speed.  They also adjusted the wafer hand-off position.




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