Shutdown epi2 SNF 2008-07-29 17:03:31: Testing

maurice at snf.stanford.edu maurice at snf.stanford.edu
Tue Jul 29 17:03:31 PDT 2008


Running wafers to see if processes have drifted, wafers are haze free, backsides are clean and we have now overtemp problems.
Hyun-Yong Yu is running Ge test.  He will report on result.  Tool may be up in the morning.




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