July 2008 Archives by author

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Starting: Tue Jul 1 09:40:44 PDT 2008
Ending: Wed Jul 30 16:26:23 PDT 2008
Messages: 49

• Shutdown epi2 SNF 2008-07-09 12:10:55: Over temp fault   eenriquez at snf.stanford.edu
• Comment epi2 SNF 2008-07-09 19:19:26: Update   eenriquez at snf.stanford.edu
• Shutdown epi2 SNF 2008-07-10 09:26:42: Down for facility water   eenriquez at snf.stanford.edu
• Problem epi2 SNF 2008-07-09 04:48:48: fail GE-ETCH-COAT x2   eenriquez at snf.stanford.edu
• Shutdown epi2 SNF 2008-07-09 12:10:55: Over temp fault   eenriquez at snf.stanford.edu
• Comment epi2 SNF 2008-07-09 19:19:26: Update   eenriquez at snf.stanford.edu
• Comment epi2 SNF 2008-07-11 15:15:28: Update   eenriquez at snf.stanford.edu
• Comment epi2 SNF 2008-07-18 15:17:05: Update   eenriquez at snf.stanford.edu
• Comment epi2 SNF 2008-07-11 15:15:28: Update   eenriquez at snf.stanford.edu
• Comment epi2 SNF 2008-07-18 15:17:05: Update   eenriquez at snf.stanford.edu
• Shutdown epi2 SNF 2008-07-10 16:12:38: SiC-coating melted on susceptor   eenriquez at snf.stanford.edu
• Shutdown epi2 SNF 2008-07-10 16:09:26: SiC-coating meted on susceptor   eenriquez at snf.stanford.edu
• Comment epi2 SNF 2008-07-22 14:11:54: HCL cleans   eenriquez at snf.stanford.edu
• Shutdown epi2 SNF 2008-07-23 10:58:31: Susceptor is coated   eenriquez at snf.stanford.edu
• Comment epi2 SNF 2008-07-25 12:05:13: Update   eenriquez at snf.stanford.edu
• Shutdown epi2 SNF 2008-07-24 17:03:00: Wafer hadling error   eenriquez at snf.stanford.edu
• Comment epi2 SNF 2008-07-25 12:05:13: Update   eenriquez at snf.stanford.edu
• Problem epi2 SNF 2008-07-09 04:48:48: fail GE-ETCH-COAT x2   masaharu at snf.stanford.edu
• Problem epi2 SNF 2008-07-09 04:57:54: fail ETCHCOAT-CHA and system is now in offline   masaharu at snf.stanford.edu
• Problem epi2 SNF 2008-07-02 00:49:14: ChA cannot go to online   maurice at snf.stanford.edu
• Problem epi2 SNF 2008-07-01 20:29:27: System in Isolated mode   maurice at snf.stanford.edu
• Problem epi2 SNF 2008-06-16 18:27:38: error message   maurice at snf.stanford.edu
• Problem epi2 SNF 2008-05-29 23:46:31: clean recipe failure   maurice at snf.stanford.edu
• Problem epi2 SNF 2008-06-02 01:49:09: dop2 deviation error   maurice at snf.stanford.edu
• Problem epi2 SNF 2008-07-05 17:46:03: Pressure Deviation fault   maurice at snf.stanford.edu
• Problem epi2 SNF 2008-07-02 22:40:08: SiH4 not flowing   maurice at snf.stanford.edu
• Comment epi2 SNF 2008-05-16 17:38:22: DCS look ok   maurice at snf.stanford.edu
• Comment epi2 SNF 2008-05-19 16:55:06: modified etch recipes   maurice at snf.stanford.edu
• Comment epi2 SNF 2008-05-30 11:24:28: Repaired HCl purge valve   maurice at snf.stanford.edu
• Shutdown epi2 SNF 2008-07-10 09:26:42: Down for facility water   maurice at snf.stanford.edu
• Problem epi2 SNF 2008-07-09 04:57:54: fail ETCHCOAT-CHA and system is now in offline   maurice at snf.stanford.edu
• Shutdown epi2 SNF 2008-07-10 16:09:26: SiC-coating meted on susceptor   maurice at snf.stanford.edu
• Shutdown epi2 SNF 2008-07-10 16:12:38: SiC-coating melted on susceptor   maurice at snf.stanford.edu
• Shutdown epi2 SNF 2008-07-11 14:46:35: low water flow   maurice at snf.stanford.edu
• Shutdown epi2 SNF 2008-07-11 14:46:35: low water flow   maurice at snf.stanford.edu
• Shutdown epi2 SNF 2008-07-23 10:58:31: Susceptor is coated   maurice at snf.stanford.edu
• Shutdown epi2 SNF 2008-07-24 17:03:00: Wafer hadling error   maurice at snf.stanford.edu
• Shutdown epi2 SNF 2008-07-29 17:03:31: Testing   maurice at snf.stanford.edu
• Shutdown epi2 SNF 2008-07-29 17:03:31: Testing   maurice at snf.stanford.edu
• Shutdown epi2 SNF 2008-07-30 16:26:23: Running wafers to clear up particles   maurice at snf.stanford.edu
• Comment epi2 SNF 2008-07-01 09:40:43: Silane   mdickey at snf.stanford.edu
• Problem epi2 SNF 2008-07-01 13:49:21: No Silane   mdickey at snf.stanford.edu
• Problem epi2 SNF 2008-07-01 13:49:21: No Silane   mdickey at snf.stanford.edu
• Comment epi2 SNF 2008-07-01 09:40:43: Silane   mdickey at snf.stanford.edu
• Comment epi2 SNF 2008-07-22 14:11:54: HCL cleans   mdickey at snf.stanford.edu
• Problem epi2 SNF 2008-07-02 00:49:14: ChA cannot go to online   ofidaner at snf.stanford.edu
• Problem epi2 SNF 2008-07-02 22:40:08: SiH4 not flowing   renshen at snf.stanford.edu
• Problem epi2 SNF 2008-07-05 17:46:03: Pressure Deviation fault   skoh at snf.stanford.edu
• Problem epi2 SNF 2008-07-01 20:29:27: System in Isolated mode   slcheng at snf.stanford.edu

Last message date: Wed Jul 30 16:26:23 PDT 2008
Archived on: Sun Dec 23 08:52:49 PST 2012

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