From yuhykr at snf.stanford.edu Mon Jun 2 01:49:10 2008 From: yuhykr at snf.stanford.edu (yuhykr at snf.stanford.edu) Date: Mon, 2 Jun 2008 01:49:10 -0700 Subject: Problem epi2 SNF 2008-06-02 01:49:09: dop2 deviation error Message-ID: dop2 : 10sccm (2%) showing this error always This condition had no problem before... From maurice at snf.stanford.edu Fri Jun 6 10:51:47 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 6 Jun 2008 10:51:47 -0700 Subject: Comment epi2 SNF 2008-06-06 10:51:46: Checked Dome: clear Message-ID: From masato at snf.stanford.edu Sat Jun 7 17:35:48 2008 From: masato at snf.stanford.edu (masato at snf.stanford.edu) Date: Sat, 7 Jun 2008 17:35:48 -0700 Subject: Shutdown epi2 SNF 2008-06-07 17:35:48: Chamber A rotation stepper failed... Message-ID: I could not transfer my wafer out of the chamber. From eenriquez at snf.stanford.edu Mon Jun 9 14:55:08 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 9 Jun 2008 14:55:08 -0700 Subject: Comment epi2 SNF 2008-06-09 14:55:08: Update Message-ID: Unable to unload the wafer from the chamber (not sitting on all pins). Ran Big Etch recipe twice and purged chamber for 2 hours. Need to vent the chamber and remove the stuck wafer. From eenriquez at snf.stanford.edu Tue Jun 10 14:52:54 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 10 Jun 2008 14:52:54 -0700 Subject: Comment epi2 SNF 2008-06-10 14:52:54: Update Message-ID: Susceptor support and wafer pin support quartz parts are broken along with the pins. Also need to replace the susceptor because of pin holes. Replacement susceptor support arrive but did not fit. Vendor will check the difference between the old and new part. Its possible that we might get the correct part tomorrow. Chamber + all parts have been cleaned and ready to be installed. From eenriquez at snf.stanford.edu Wed Jun 11 17:23:22 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 11 Jun 2008 17:23:22 -0700 Subject: Comment epi2 SNF 2008-06-11 17:23:18: Update Message-ID: Problem with poor fitting quartz parts. Vendor will bring repaired part tomorrow at around 11am. From eenriquez at snf.stanford.edu Fri Jun 13 10:19:56 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 13 Jun 2008 10:19:56 -0700 Subject: Shutdown epi2 SNF 2008-06-07 17:35:48: Chamber A rotation stepper failed... Message-ID: Replaced susceptor, susceptor lift, susceptor lift pins, wafer lift. Cycled a wafer in and out the chamber several times without problems. Ran the ge-etch coat recipe. From eenriquez at snf.stanford.edu Fri Jun 13 10:20:11 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 13 Jun 2008 10:20:11 -0700 Subject: Comment epi2 SNF 2008-06-09 14:55:08: Update Message-ID: Noted From eenriquez at snf.stanford.edu Fri Jun 13 10:20:21 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 13 Jun 2008 10:20:21 -0700 Subject: Comment epi2 SNF 2008-06-10 14:52:54: Update Message-ID: Noted From eenriquez at snf.stanford.edu Fri Jun 13 10:20:31 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 13 Jun 2008 10:20:31 -0700 Subject: Comment epi2 SNF 2008-06-11 17:23:18: Update Message-ID: Noted From eenriquez at snf.stanford.edu Fri Jun 13 10:20:39 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 13 Jun 2008 10:20:39 -0700 Subject: Comment epi2 SNF 2008-06-06 10:51:46: Checked Dome: clear Message-ID: Noted From yoonjin at snf.stanford.edu Mon Jun 16 18:27:40 2008 From: yoonjin at snf.stanford.edu (yoonjin at snf.stanford.edu) Date: Mon, 16 Jun 2008 18:27:40 -0700 Subject: Problem epi2 SNF 2008-06-16 18:27:38: error message Message-ID: I used my own si-dep recipe. At step 3(bake), I saw the message 'upper temp is too high or reading impposible ~1275'. It stopped my recipe and went to cold idle automatically. From rshyam at snf.stanford.edu Thu Jun 26 10:20:09 2008 From: rshyam at snf.stanford.edu (rshyam at snf.stanford.edu) Date: Thu, 26 Jun 2008 10:20:09 -0700 Subject: Problem epi2 SNF 2008-06-26 10:20:09: Wafer handling Message-ID: Wafer handling is completely messed up like it was before. I got errors a couple of times and Shen also got errors last night. LLA is in much worse condition than LLB. PLEASE USE LLB ONLY.