Comment epi2 SNF 2008-06-09 14:55:08: Update

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Jun 9 14:55:08 PDT 2008


Unable to unload the wafer from the chamber (not sitting on all pins).  Ran Big Etch recipe twice  and purged chamber for 2 hours.
Need to vent the chamber and remove the stuck wafer.




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