Comment epi2 SNF 2008-06-10 14:52:54: Update

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue Jun 10 14:52:54 PDT 2008


Susceptor support and wafer pin support quartz parts are broken along with the pins.  Also need to replace the susceptor because of pin holes.  Replacement susceptor support arrive but did not fit.  Vendor will check the difference between the old and new part.  Its possible that we might get the correct part tomorrow.
Chamber + all parts have been cleaned and ready to be installed.




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