Shutdown epi2 SNF 2008-06-07 17:35:48: Chamber A rotation stepper failed...

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Fri Jun 13 10:19:56 PDT 2008


Replaced susceptor, susceptor lift, susceptor lift pins, wafer lift.  Cycled a wafer in and out the chamber several times without problems.  Ran the ge-etch coat recipe.




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