Problem epi2 SNF 2008-06-16 18:27:38: error message

yoonjin at yoonjin at
Mon Jun 16 18:27:40 PDT 2008

I used my own si-dep recipe. At step 3(bake), I saw the message 'upper temp is too high or reading impposible ~1275'.
It stopped my recipe and went to cold idle automatically.

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