From eenriquez at snf.stanford.edu Mon Mar 3 14:57:50 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 3 Mar 2008 14:57:50 -0800 Subject: Shutdown epi2 SNF 2008-02-26 17:13:43: Dome coated Message-ID: Installed new Dome. Replaced susceptor lift, lift pins and susceptor support pins. From eenriquez at snf.stanford.edu Mon Mar 3 14:57:56 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 3 Mar 2008 14:57:56 -0800 Subject: Comment epi2 SNF 2008-02-27 19:23:22: Update Message-ID: Installed new Dome. Replaced susceptor lift, lift pins and susceptor support pins. From eenriquez at snf.stanford.edu Mon Mar 3 14:58:04 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 3 Mar 2008 14:58:04 -0800 Subject: Comment epi2 SNF 2008-02-28 14:49:58: Update Message-ID: Installed new Dome. Replaced susceptor lift, lift pins and susceptor support pins. From eenriquez at snf.stanford.edu Mon Mar 3 15:03:18 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 3 Mar 2008 15:03:18 -0800 Subject: Comment epi2 SNF 2008-02-29 14:47:31: Handling update Message-ID: Found one of the wafer lift pins broken. The cause of the breakage was one of the pin guides had some burrs which cause the pin to stick. Replaced the susceptor support. From eenriquez at snf.stanford.edu Mon Mar 3 15:04:17 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 3 Mar 2008 15:04:17 -0800 Subject: Comment epi2 SNF 2008-03-03 15:04:16: Needs to be tested Message-ID: From maurice at snf.stanford.edu Mon Mar 3 16:30:07 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 3 Mar 2008 16:30:07 -0800 Subject: Shutdown epi2 SNF 2008-03-03 16:30:07: Hazy wafers Message-ID: System is out gassing from being open. Various users are running recipes to bake out the system. They will let us know when the wafers are hazy free so we can clear the shutdown. From maurice at snf.stanford.edu Tue Mar 4 09:50:11 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 4 Mar 2008 09:50:11 -0800 Subject: Shutdown epi2 SNF 2008-03-03 16:30:07: Hazy wafers Message-ID: Munehiro reports: I ran the recipe for two wafers. The first wafer was hazy only outside of the wafer. The second wafer was no hazy, but has only a few particles on the surface. From maurice at snf.stanford.edu Tue Mar 4 09:50:37 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 4 Mar 2008 09:50:37 -0800 Subject: Comment epi2 SNF 2008-03-03 15:04:16: Needs to be tested Message-ID: The first wafer was hazy only outside of the wafer. The second wafer was no hazy, but has only a few particles on the surface. From maurice at snf.stanford.edu Tue Mar 4 09:51:12 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 4 Mar 2008 09:51:12 -0800 Subject: Problem epi2 SNF 2008-02-26 09:26:19: Handling issues reported on A side Message-ID: AMAT came in and adjusted elevator height From ofidaner at snf.stanford.edu Fri Mar 7 17:05:13 2008 From: ofidaner at snf.stanford.edu (ofidaner at snf.stanford.edu) Date: Fri, 7 Mar 2008 17:05:13 -0800 Subject: Problem epi2 SNF 2008-03-07 17:05:13: "bulb failed" error encountered Message-ID: I reset the chamber and restarted, it seems to work ok now. It may be a good idea to check the lamps, though. From ofidaner at snf.stanford.edu Fri Mar 7 18:45:10 2008 From: ofidaner at snf.stanford.edu (ofidaner at snf.stanford.edu) Date: Fri, 7 Mar 2008 18:45:10 -0800 Subject: Problem epi2 SNF 2008-03-07 18:45:09: ChA isolated state Message-ID: ChA entered an "isolated" state during GEETCHCOAT. I cannot get out of this state. I am not doing a shutdown in case it can be fixed somehow. From rshyam at snf.stanford.edu Sat Mar 8 00:51:31 2008 From: rshyam at snf.stanford.edu (rshyam at snf.stanford.edu) Date: Sat, 8 Mar 2008 00:51:31 -0800 Subject: Comment epi2 SNF 2008-03-08 00:51:31: Chamber online Message-ID: I brought the chamber back online. So far it seems ok... From rshyam at snf.stanford.edu Sat Mar 8 03:50:24 2008 From: rshyam at snf.stanford.edu (rshyam at snf.stanford.edu) Date: Sat, 8 Mar 2008 03:50:24 -0800 Subject: Comment epi2 SNF 2008-03-08 03:50:24: Chamber A overpressure Message-ID: recipe seemed to run fine on one wafer. during ge etch coat recipe, it gave chamber A overpressure error and got isolated. brought it back online and ran ge etch coat again. seemed to run ok this time. From masato at snf.stanford.edu Sat Mar 8 23:12:48 2008 From: masato at snf.stanford.edu (masato at snf.stanford.edu) Date: Sat, 8 Mar 2008 23:12:48 -0800 Subject: Problem epi2 SNF 2008-03-08 23:12:48: ChA heater contractor off Message-ID: ChA over pressure error and ChA Heater contractor off occurred, when cleaning recipe is running. Now ChA is in isolated state. I cannot do online. I am not doing shutdown in case that it may be fixed From yuhykr at snf.stanford.edu Sun Mar 9 14:44:09 2008 From: yuhykr at snf.stanford.edu (yuhykr at snf.stanford.edu) Date: Sun, 9 Mar 2008 14:44:09 -0700 Subject: Shutdown epi2 SNF 2008-03-09 14:44:08: can't go to online Message-ID: From eenriquez at snf.stanford.edu Mon Mar 10 09:21:37 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 10 Mar 2008 09:21:37 -0700 Subject: Comment epi2 SNF 2008-03-10 09:21:37: Update Message-ID: Placed system online. The first time I ran the Big Etch, the system had a "temp deviation" failure. Before I ran the etch a second time, I placed the system in "active idle" and let the temperature raise to above 650C. The Big Etch recipe ran without a problem. Maurice will run a standard process to check out the system. From maurice at snf.stanford.edu Mon Mar 10 11:03:48 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 10 Mar 2008 11:03:48 -0700 Subject: Problem epi2 SNF 2008-03-07 17:05:13: "bulb failed" error encountered Message-ID: Temp deviation fault shutdown From maurice at snf.stanford.edu Mon Mar 10 11:04:26 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 10 Mar 2008 11:04:26 -0700 Subject: Problem epi2 SNF 2008-03-07 18:45:09: ChA isolated state Message-ID: Unable to repeat this error From maurice at snf.stanford.edu Mon Mar 10 11:04:50 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 10 Mar 2008 11:04:50 -0700 Subject: Comment epi2 SNF 2008-03-08 00:51:31: Chamber online Message-ID: User comment logged From maurice at snf.stanford.edu Mon Mar 10 11:08:25 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 10 Mar 2008 11:08:25 -0700 Subject: Comment epi2 SNF 2008-03-08 03:50:24: Chamber A overpressure Message-ID: Ran the Ge etch, Si etch, Big etch, SiGe750 deposition and another Ge etch without any problems. We will continue to watch system. From maurice at snf.stanford.edu Mon Mar 10 11:08:39 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 10 Mar 2008 11:08:39 -0700 Subject: Shutdown epi2 SNF 2008-03-09 14:44:08: can't go to online Message-ID: Ran the Ge etch, Si etch, Big etch, SiGe750 deposition and another Ge etch without any problems. We will continue to watch system. From maurice at snf.stanford.edu Mon Mar 10 11:08:52 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 10 Mar 2008 11:08:52 -0700 Subject: Comment epi2 SNF 2008-03-10 09:21:37: Update Message-ID: Ran the Ge etch, Si etch, Big etch, SiGe750 deposition and another Ge etch without any problems. We will continue to watch system. From maurice at snf.stanford.edu Mon Mar 10 11:09:11 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 10 Mar 2008 11:09:11 -0700 Subject: Problem epi2 SNF 2008-03-08 23:12:48: ChA heater contractor off Message-ID: Ran the Ge etch, Si etch, Big etch, SiGe750 deposition and another Ge etch without any problems. We will continue to watch system. From maurice at snf.stanford.edu Mon Mar 10 11:10:51 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 10 Mar 2008 11:10:51 -0700 Subject: Problem epi2 SNF 2008-03-10 11:10:45: Under observation Message-ID: Users report overpressure and overtemp fault. Ran the Ge etch, Si etch, Big etch, SiGe750 deposition and another Ge etch without any problems. We will continue to watch system. From maurice at snf.stanford.edu Mon Mar 10 11:15:31 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 10 Mar 2008 11:15:31 -0700 Subject: Problem epi2 SNF 2008-02-25 14:01:50: wafer transfer error Message-ID: AMAT came in and adjusted cassette heights. They suggest using load lock B. It is closer to the center. From masaharu at snf.stanford.edu Tue Mar 11 06:26:28 2008 From: masaharu at snf.stanford.edu (masaharu at snf.stanford.edu) Date: Tue, 11 Mar 2008 06:26:28 -0700 Subject: Shutdown epi2 SNF 2008-03-11 06:26:27: valves do not close Message-ID: After the process, I found that valves from GeH4 to vent and chamber did not close on panel. I tried to manually close, however, it didn't work. Please inspect this problem. From eenriquez at snf.stanford.edu Tue Mar 11 09:58:23 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 11 Mar 2008 09:58:23 -0700 Subject: Shutdown epi2 SNF 2008-03-11 06:26:27: valves do not close Message-ID: We believe that the valves are suppose to be left open. The system does an MFC pump out after the GeH4 has been used. We will contact Applied Materials to verify. From maurice at snf.stanford.edu Wed Mar 12 15:31:51 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 12 Mar 2008 15:31:51 -0700 Subject: Shutdown epi2 SNF 2008-03-12 15:31:51: changing HCl bottle Message-ID: From eenriquez at snf.stanford.edu Wed Mar 12 17:24:19 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 12 Mar 2008 17:24:19 -0700 Subject: Shutdown epi2 SNF 2008-03-12 15:31:51: changing HCl bottle Message-ID: Completed HCl cylinder change. From maurice at snf.stanford.edu Fri Mar 14 17:43:28 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 14 Mar 2008 17:43:28 -0700 Subject: Comment epi2 SNF 2008-03-14 17:43:27: Message-ID: From maurice at snf.stanford.edu Fri Mar 14 17:46:47 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 14 Mar 2008 17:46:47 -0700 Subject: Problem epi2 SNF 2008-03-14 17:46:47: Wafer stuck in LL A/ Use LL B Message-ID: Wafer slide out of cassette A (just a little bit). I closed slit to transfer chamber using DI/DO board. But wafer still inside. Use LL B. From masato at snf.stanford.edu Fri Mar 14 21:00:40 2008 From: masato at snf.stanford.edu (masato at snf.stanford.edu) Date: Fri, 14 Mar 2008 21:00:40 -0700 Subject: Problem epi2 SNF 2008-03-14 21:00:40: Manual mode only? Message-ID: Automatic mode did not run, showing " The load lock A is not ready to send a wafer ". Manual mode seems to work well. From ryw at snf.stanford.edu Sun Mar 16 16:21:21 2008 From: ryw at snf.stanford.edu (ryw at snf.stanford.edu) Date: Sun, 16 Mar 2008 16:21:21 -0700 Subject: Comment epi2 SNF 2008-03-16 16:21:21: LLA ok to use Message-ID: LLA back to normal, unload the stucked wafer, both LLs can be used From maurice at snf.stanford.edu Mon Mar 17 09:33:45 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 17 Mar 2008 09:33:45 -0700 Subject: Problem epi2 SNF 2008-03-14 21:00:40: Manual mode only? Message-ID: LLA back to normal, unload the stucked wafer, both LLs can be used From maurice at snf.stanford.edu Mon Mar 17 09:33:59 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 17 Mar 2008 09:33:59 -0700 Subject: Problem epi2 SNF 2008-03-14 17:46:47: Wafer stuck in LL A/ Use LL B Message-ID: LLA back to normal, unload the stucked wafer, both LLs can be used From maurice at snf.stanford.edu Mon Mar 17 14:23:40 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 17 Mar 2008 14:23:40 -0700 Subject: Comment epi2 SNF 2008-03-17 14:23:35: Dome clear Message-ID: Inspected dome: clear From masaharu at snf.stanford.edu Sat Mar 22 21:20:32 2008 From: masaharu at snf.stanford.edu (masaharu at snf.stanford.edu) Date: Sat, 22 Mar 2008 21:20:32 -0700 Subject: Problem epi2 SNF 2008-03-22 21:20:31: scrubber fault Message-ID: Before running recipe, I checked the status of epi2. I found scrubber fault alarm. Reset for chamber A didn't work. From tberg at snf.stanford.edu Mon Mar 24 07:00:02 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 24 Mar 2008 07:00:02 -0700 Subject: Problem epi2 SNF 2008-03-22 21:20:31: scrubber fault Message-ID: From tberg at snf.stanford.edu Mon Mar 24 07:00:37 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 24 Mar 2008 07:00:37 -0700 Subject: Comment epi2 SNF 2008-03-24 07:00:36: Reset Scrubber cleared fault Message-ID: From tberg at snf.stanford.edu Mon Mar 24 07:00:50 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 24 Mar 2008 07:00:50 -0700 Subject: Comment epi2 SNF 2008-03-14 17:43:27: Message-ID: From maurice at snf.stanford.edu Mon Mar 24 15:37:30 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 24 Mar 2008 15:37:30 -0700 Subject: Comment epi2 SNF 2008-03-24 15:37:29: Inspected dome/looks good Message-ID: Dome inspected From masaharu at snf.stanford.edu Tue Mar 25 06:10:46 2008 From: masaharu at snf.stanford.edu (masaharu at snf.stanford.edu) Date: Tue, 25 Mar 2008 06:10:46 -0700 Subject: Comment epi2 SNF 2008-03-25 06:10:46: SiH4 10sccm is not controlable Message-ID: SiH4 10sccm is now not controlable, although I used to use this condition before. Actual value is around 4.6sccm. SiH4 comes to be controlable above 15sccm. From seymour at snf.stanford.edu Tue Mar 25 10:48:47 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 25 Mar 2008 10:48:47 -0700 Subject: Comment epi2 SNF 2008-03-25 10:48:46: the diborane cylinders arrived Message-ID: I p[laced both the 1% and the 100ppm cylindr on 24 hour leak check. From seymour at snf.stanford.edu Wed Mar 26 13:32:09 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 26 Mar 2008 13:32:09 -0700 Subject: Problem epi2 SNF 2008-02-08 14:44:22: No Low P dopant Message-ID: Both the 1% and the 100 ppm cylinders have been installed and passed leak check. I have turned on the dopant sources to the tool. From seymour at snf.stanford.edu Wed Mar 26 13:33:05 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 26 Mar 2008 13:33:05 -0700 Subject: Comment epi2 SNF 2008-02-28 14:11:19: Diborane Message-ID: Both the P source cylinders installed and turned on to the tool. From seymour at snf.stanford.edu Wed Mar 26 13:33:44 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 26 Mar 2008 13:33:44 -0700 Subject: Comment epi2 SNF 2008-02-29 10:28:49: Diborane Message-ID: both P source cylinders are now on. From maurice at snf.stanford.edu Wed Mar 26 13:55:30 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 26 Mar 2008 13:55:30 -0700 Subject: Comment epi2 SNF 2008-03-25 10:48:46: the diborane cylinders arrived Message-ID: Leak check ok. Bottles on line. From maurice at snf.stanford.edu Wed Mar 26 13:56:11 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 26 Mar 2008 13:56:11 -0700 Subject: Problem epi2 SNF 2008-03-10 11:10:45: Under observation Message-ID: Have not see the overpressure issue in a few weeks. From maurice at snf.stanford.edu Thu Mar 27 09:36:39 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 27 Mar 2008 09:36:39 -0700 Subject: Shutdown epi2 SNF 2008-03-27 09:36:39: HCl bottle change Message-ID: Should only take about an hour. From maurice at snf.stanford.edu Thu Mar 27 11:07:59 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 27 Mar 2008 11:07:59 -0700 Subject: Shutdown epi2 SNF 2008-03-27 09:36:39: HCl bottle change Message-ID: complete