March 2008 Archives by date

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Starting: Mon Mar 3 14:57:50 PST 2008
Ending: Thu Mar 27 11:07:59 PDT 2008
Messages: 50

• Shutdown epi2 SNF 2008-02-26 17:13:43: Dome coated   eenriquez at snf.stanford.edu
• Comment epi2 SNF 2008-02-27 19:23:22: Update   eenriquez at snf.stanford.edu
• Comment epi2 SNF 2008-02-28 14:49:58: Update   eenriquez at snf.stanford.edu
• Comment epi2 SNF 2008-02-29 14:47:31: Handling update   eenriquez at snf.stanford.edu
• Comment epi2 SNF 2008-03-03 15:04:16: Needs to be tested   eenriquez at snf.stanford.edu
• Shutdown epi2 SNF 2008-03-03 16:30:07: Hazy wafers   maurice at snf.stanford.edu
• Shutdown epi2 SNF 2008-03-03 16:30:07: Hazy wafers   maurice at snf.stanford.edu
• Comment epi2 SNF 2008-03-03 15:04:16: Needs to be tested   maurice at snf.stanford.edu
• Problem epi2 SNF 2008-02-26 09:26:19: Handling issues reported on A side   maurice at snf.stanford.edu
• Problem epi2 SNF 2008-03-07 17:05:13: "bulb failed" error encountered   ofidaner at snf.stanford.edu
• Problem epi2 SNF 2008-03-07 18:45:09: ChA isolated state   ofidaner at snf.stanford.edu
• Comment epi2 SNF 2008-03-08 00:51:31: Chamber online   rshyam at snf.stanford.edu
• Comment epi2 SNF 2008-03-08 03:50:24: Chamber A overpressure   rshyam at snf.stanford.edu
• Problem epi2 SNF 2008-03-08 23:12:48: ChA heater contractor off   masato at snf.stanford.edu
• Shutdown epi2 SNF 2008-03-09 14:44:08: can't go to online   yuhykr at snf.stanford.edu
• Comment epi2 SNF 2008-03-10 09:21:37: Update   eenriquez at snf.stanford.edu
• Problem epi2 SNF 2008-03-07 17:05:13: "bulb failed" error encountered   maurice at snf.stanford.edu
• Problem epi2 SNF 2008-03-07 18:45:09: ChA isolated state   maurice at snf.stanford.edu
• Comment epi2 SNF 2008-03-08 00:51:31: Chamber online   maurice at snf.stanford.edu
• Comment epi2 SNF 2008-03-08 03:50:24: Chamber A overpressure   maurice at snf.stanford.edu
• Shutdown epi2 SNF 2008-03-09 14:44:08: can't go to online   maurice at snf.stanford.edu
• Comment epi2 SNF 2008-03-10 09:21:37: Update   maurice at snf.stanford.edu
• Problem epi2 SNF 2008-03-08 23:12:48: ChA heater contractor off   maurice at snf.stanford.edu
• Problem epi2 SNF 2008-03-10 11:10:45: Under observation   maurice at snf.stanford.edu
• Problem epi2 SNF 2008-02-25 14:01:50: wafer transfer error   maurice at snf.stanford.edu
• Shutdown epi2 SNF 2008-03-11 06:26:27: valves do not close   masaharu at snf.stanford.edu
• Shutdown epi2 SNF 2008-03-11 06:26:27: valves do not close   eenriquez at snf.stanford.edu
• Shutdown epi2 SNF 2008-03-12 15:31:51: changing HCl bottle   maurice at snf.stanford.edu
• Shutdown epi2 SNF 2008-03-12 15:31:51: changing HCl bottle   eenriquez at snf.stanford.edu
• Comment epi2 SNF 2008-03-14 17:43:27:   maurice at snf.stanford.edu
• Problem epi2 SNF 2008-03-14 17:46:47: Wafer stuck in LL A/ Use LL B   maurice at snf.stanford.edu
• Problem epi2 SNF 2008-03-14 21:00:40: Manual mode only?   masato at snf.stanford.edu
• Comment epi2 SNF 2008-03-16 16:21:21: LLA ok to use   ryw at snf.stanford.edu
• Problem epi2 SNF 2008-03-14 21:00:40: Manual mode only?   maurice at snf.stanford.edu
• Problem epi2 SNF 2008-03-14 17:46:47: Wafer stuck in LL A/ Use LL B   maurice at snf.stanford.edu
• Comment epi2 SNF 2008-03-17 14:23:35: Dome clear   maurice at snf.stanford.edu
• Problem epi2 SNF 2008-03-22 21:20:31: scrubber fault   masaharu at snf.stanford.edu
• Problem epi2 SNF 2008-03-22 21:20:31: scrubber fault   tberg at snf.stanford.edu
• Comment epi2 SNF 2008-03-24 07:00:36: Reset Scrubber cleared fault   tberg at snf.stanford.edu
• Comment epi2 SNF 2008-03-14 17:43:27:   tberg at snf.stanford.edu
• Comment epi2 SNF 2008-03-24 15:37:29: Inspected dome/looks good   maurice at snf.stanford.edu
• Comment epi2 SNF 2008-03-25 06:10:46: SiH4 10sccm is not controlable   masaharu at snf.stanford.edu
• Comment epi2 SNF 2008-03-25 10:48:46: the diborane cylinders arrived   seymour at snf.stanford.edu
• Problem epi2 SNF 2008-02-08 14:44:22: No Low P dopant   seymour at snf.stanford.edu
• Comment epi2 SNF 2008-02-28 14:11:19: Diborane   seymour at snf.stanford.edu
• Comment epi2 SNF 2008-02-29 10:28:49: Diborane   seymour at snf.stanford.edu
• Comment epi2 SNF 2008-03-25 10:48:46: the diborane cylinders arrived   maurice at snf.stanford.edu
• Problem epi2 SNF 2008-03-10 11:10:45: Under observation   maurice at snf.stanford.edu
• Shutdown epi2 SNF 2008-03-27 09:36:39: HCl bottle change   maurice at snf.stanford.edu
• Shutdown epi2 SNF 2008-03-27 09:36:39: HCl bottle change   maurice at snf.stanford.edu

Last message date: Thu Mar 27 11:07:59 PDT 2008
Archived on: Sun Dec 23 08:52:48 PST 2012

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