From tberg at snf.stanford.edu Thu May 1 06:48:17 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 1 May 2008 06:48:17 -0700 Subject: Shutdown epi2 SNF 2008-05-01 06:48:17: GE Change Message-ID: GEH4 cylinder change From tberg at snf.stanford.edu Thu May 1 07:26:35 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 1 May 2008 07:26:35 -0700 Subject: Comment epi2 SNF 2008-04-25 06:53:43: GEH4 low Message-ID: Replaced GeH4 cylinder From tberg at snf.stanford.edu Thu May 1 07:27:02 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 1 May 2008 07:27:02 -0700 Subject: Shutdown epi2 SNF 2008-05-01 06:48:17: GE Change Message-ID: Replaced GeH4 cylinder From yuhykr at snf.stanford.edu Sat May 3 01:39:12 2008 From: yuhykr at snf.stanford.edu (yuhykr at snf.stanford.edu) Date: Sat, 3 May 2008 01:39:12 -0700 Subject: Problem epi2 SNF 2008-05-03 01:39:12: Heat contractor off error Message-ID: During the cleaning this error was coming out From eenriquez at snf.stanford.edu Mon May 5 08:07:18 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 5 May 2008 08:07:18 -0700 Subject: Problem epi2 SNF 2008-05-03 01:39:12: Heat contractor off error Message-ID: User fixed the problem, heater contactor is back on. From eenriquez at snf.stanford.edu Mon May 5 10:27:05 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 5 May 2008 10:27:05 -0700 Subject: Comment epi2 SNF 2008-05-05 10:27:04: Update contactor off Message-ID: The reported heater contactor shutoff was caused by the facilities cooling water problem. From eenriquez at snf.stanford.edu Wed May 7 07:13:11 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 7 May 2008 07:13:11 -0700 Subject: Comment epi2 SNF 2008-05-05 10:27:04: Update contactor off Message-ID: Noted From maurice at snf.stanford.edu Fri May 9 13:48:56 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 9 May 2008 13:48:56 -0700 Subject: Problem epi2 SNF 2007-10-25 14:38:14: hard drive full Message-ID: New floppy drive installed and working From maurice at snf.stanford.edu Fri May 9 13:49:17 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 9 May 2008 13:49:17 -0700 Subject: Comment epi2 SNF 2008-03-17 14:23:35: Dome clear Message-ID: archived From maurice at snf.stanford.edu Fri May 9 13:49:29 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 9 May 2008 13:49:29 -0700 Subject: Comment epi2 SNF 2008-03-16 16:21:21: LLA ok to use Message-ID: archived From maurice at snf.stanford.edu Fri May 9 13:49:42 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 9 May 2008 13:49:42 -0700 Subject: Comment epi2 SNF 2007-10-12 15:49:48: Burnbox:sparkplug changed Message-ID: archived From maurice at snf.stanford.edu Fri May 9 13:50:01 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 9 May 2008 13:50:01 -0700 Subject: Comment epi2 SNF 2007-11-06 11:55:31: Update pressure deviation Message-ID: archived From maurice at snf.stanford.edu Fri May 9 13:50:11 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 9 May 2008 13:50:11 -0700 Subject: Comment epi2 SNF 2008-03-24 15:37:29: Inspected dome/looks good Message-ID: archived From maurice at snf.stanford.edu Fri May 9 13:50:32 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 9 May 2008 13:50:32 -0700 Subject: Comment epi2 SNF 2008-04-03 11:11:27: HCL Message-ID: bottle change complete From rshyam at snf.stanford.edu Mon May 12 21:02:00 2008 From: rshyam at snf.stanford.edu (rshyam at snf.stanford.edu) Date: Mon, 12 May 2008 21:02:00 -0700 Subject: Problem epi2 SNF 2008-05-12 21:01:59: DCS flow error Message-ID: On behalf of Hyun-Yong Yu : DCS flow error From maurice at snf.stanford.edu Tue May 13 14:36:39 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 13 May 2008 14:36:39 -0700 Subject: Comment epi2 SNF 2008-05-13 14:36:39: dome checked: ok Message-ID: From maurice at snf.stanford.edu Tue May 13 15:18:56 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 13 May 2008 15:18:56 -0700 Subject: Problem epi2 SNF 2008-05-12 21:01:59: DCS flow error Message-ID: Ran DCS manually at flows of 50, 100 and 150. No problem. Ran the etcn/coat program (it flows 500 sccm of DCS) with no error. From maurice at snf.stanford.edu Tue May 13 15:19:19 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 13 May 2008 15:19:19 -0700 Subject: Comment epi2 SNF 2008-04-11 16:55:27: Inspected Dome: Clear Message-ID: archive comment From caner at snf.stanford.edu Wed May 14 15:03:07 2008 From: caner at snf.stanford.edu (caner at snf.stanford.edu) Date: Wed, 14 May 2008 15:03:07 -0700 Subject: Shutdown epi2 SNF 2008-05-14 15:03:06: temperature cannot go higher than 750 Message-ID: I can't run the GE-ETCH-COAT recipe. The temperature gets stuck at 750 C- the recipe aborts at step 2. From eenriquez at snf.stanford.edu Wed May 14 18:40:46 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 14 May 2008 18:40:46 -0700 Subject: Shutdown epi2 SNF 2008-05-14 15:03:06: temperature cannot go higher than 750 Message-ID: All upper lamps checked ok. I believe the reason why the temp could not go higher than 750 C is because the dome was heavily coated. Ran the Ge etch recipe 2 x. I had to lower the temp setpoint on step 2 (800 to 750c) and step 5 (1190 to 1100 C) in order to complete the clean recipe. The second time I ran the clean, the recipe ran OK at the standard temp settings. From eenriquez at snf.stanford.edu Wed May 14 18:40:56 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 14 May 2008 18:40:56 -0700 Subject: Comment epi2 SNF 2008-05-13 14:36:39: dome checked: ok Message-ID: Noted From eenriquez at snf.stanford.edu Thu May 15 14:59:31 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 15 May 2008 14:59:31 -0700 Subject: Shutdown epi2 SNF 2008-05-15 14:59:30: Ge etch coat recipe problem Message-ID: Very slow temperature response due to heavy coating on the dome. It looks like the Ge etch coat recipe has been modified where the HCl flows has been set to -1 . The coat part of the recipe looks OK. I do not have the correct flow settings so I will leave it down for Maurice. We will have to adjust the temperature settings of the corrected recipe for the first few cleans because of the slow temperature response. From eenriquez at snf.stanford.edu Fri May 16 09:05:41 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 16 May 2008 09:05:41 -0700 Subject: Comment epi2 SNF 2008-05-16 09:05:40: Update Message-ID: Dome is still heavily coated. Currently running the ZBig etch (no coat clean). Will check dome again after the clean. From maurice at snf.stanford.edu Fri May 16 15:01:13 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 16 May 2008 15:01:13 -0700 Subject: Shutdown epi2 SNF 2008-05-16 15:01:13: DCS flow flucuating Message-ID: May be liquid in the line. May need to be evacuated from the bottle side. From maurice at snf.stanford.edu Fri May 16 16:35:21 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 16 May 2008 16:35:21 -0700 Subject: Shutdown epi2 SNF 2008-05-15 14:59:30: Ge etch coat recipe problem Message-ID: I am not sure if the HCl bypass (Hi Flow HCl) is working. I have modified the the silicon and Ge etch recipes so that they use both the HCl MFC and the bypass (in seperate steps). The HCl MFC max flow is 1000sccm so I set the etch flow to 980sccm. Ran several long etcges and the dome is now clear. Thank you Hyunyong for the help and suggestions! From maurice at snf.stanford.edu Fri May 16 16:37:00 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 16 May 2008 16:37:00 -0700 Subject: Shutdown epi2 SNF 2008-05-16 15:01:13: DCS flow flucuating Message-ID: >From Ray: I went out and found the dichlor pressure to be almost 15 psi and the recirc was not on. I pumped the line and got bubble bursts at about 20 inches of Mercury. I then turned on the Dichlor slowly and it came up to about 12 psi. All I can do for today. From maurice at snf.stanford.edu Fri May 16 16:38:17 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 16 May 2008 16:38:17 -0700 Subject: Comment epi2 SNF 2008-05-16 09:05:40: Update Message-ID: See Maurice's 5/16/08 message about the Ge etch recipe From maurice at snf.stanford.edu Fri May 16 17:38:23 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 16 May 2008 17:38:23 -0700 Subject: Comment epi2 SNF 2008-05-16 17:38:22: DCS look ok Message-ID: After Ray turned on DCS recirc and evacuated the gas line, I ran both the Ge and Si etch/coat programs. DCS was rock solid at the set point. From ryw at snf.stanford.edu Fri May 16 23:48:26 2008 From: ryw at snf.stanford.edu (ryw at snf.stanford.edu) Date: Fri, 16 May 2008 23:48:26 -0700 Subject: Problem epi2 SNF 2008-05-16 23:48:25: Chamber A pressure too high Message-ID: chamber A pressure goes up to atm after Ge etch coat, did reset and global reset several times, system still in isolated mode From slcheng at snf.stanford.edu Mon May 19 01:07:05 2008 From: slcheng at snf.stanford.edu (slcheng at snf.stanford.edu) Date: Mon, 19 May 2008 01:07:05 -0700 Subject: Problem epi2 SNF 2008-05-19 01:07:05: Load Lock B stepper failed Message-ID: Can't open the door right now. the fail message shows Load lock stepper failed. From eenriquez at snf.stanford.edu Mon May 19 11:21:58 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 19 May 2008 11:21:58 -0700 Subject: Problem epi2 SNF 2008-05-19 01:07:05: Load Lock B stepper failed Message-ID: Rehomed load lock b and unloaded the user's wafers From eenriquez at snf.stanford.edu Mon May 19 11:32:24 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 19 May 2008 11:32:24 -0700 Subject: Problem epi2 SNF 2008-05-16 23:48:25: Chamber A pressure too high Message-ID: Ran the etch coat program but could not repeat the problem. DCS flow checked OK. We will continue to monitor the system. From maurice at snf.stanford.edu Mon May 19 16:55:07 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 19 May 2008 16:55:07 -0700 Subject: Comment epi2 SNF 2008-05-19 16:55:06: modified etch recipes Message-ID: Found the dome coated so added more time to the etch steps From skoh at snf.stanford.edu Wed May 21 08:39:17 2008 From: skoh at snf.stanford.edu (skoh at snf.stanford.edu) Date: Wed, 21 May 2008 08:39:17 -0700 Subject: Problem epi2 SNF 2008-05-21 08:39:16: DCS Flow Error Message-ID: DCS Flow is not stable. For a Setpoint of 100, flow varied fromapproximately 20 to 400, and the recipe would fault out. From eenriquez at snf.stanford.edu Wed May 21 09:18:48 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 21 May 2008 09:18:48 -0700 Subject: Shutdown epi2 SNF 2008-05-21 09:18:47: DCS update Message-ID: Installing a new chiller for the DCS gas cylinder cooling jacket. We will pump out the gas line and test. System should be ready by noon. From eenriquez at snf.stanford.edu Wed May 21 11:17:48 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 21 May 2008 11:17:48 -0700 Subject: Shutdown epi2 SNF 2008-05-21 09:18:47: DCS update Message-ID: Installed new chiller. Pumped out gas line. Verified flow at 100 sccm. From eenriquez at snf.stanford.edu Wed May 21 11:18:19 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 21 May 2008 11:18:19 -0700 Subject: Problem epi2 SNF 2008-05-21 08:39:16: DCS Flow Error Message-ID: Installed new chiller. Pumped out gas line. Verified flow at 100 sccm. From munehiro at snf.stanford.edu Fri May 23 20:00:23 2008 From: munehiro at snf.stanford.edu (munehiro at snf.stanford.edu) Date: Fri, 23 May 2008 20:00:23 -0700 Subject: Problem epi2 SNF 2008-05-23 20:00:22: low temperature deviation fault Message-ID: low temperature deviation fault is occured at 310C. I could not run my recipe. From rshyam at snf.stanford.edu Mon May 26 20:55:52 2008 From: rshyam at snf.stanford.edu (rshyam at snf.stanford.edu) Date: Mon, 26 May 2008 20:55:52 -0700 Subject: Shutdown epi2 SNF 2008-05-26 20:55:52: No HCL/ Repeated Low temp deviation fault/ Repeated chamber overpressure error in ge etch coat recipe Message-ID: 1) Ran out of HCL 2) Repeated lower temperature deviation faults across recipes 3) Repeated chamber overpressure error in Ge etch coat recipe From eenriquez at snf.stanford.edu Tue May 27 08:53:06 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 27 May 2008 08:53:06 -0700 Subject: Comment epi2 SNF 2008-05-27 08:53:05: HCl cylinder change problem Message-ID: Defective hi press or low press purge valve. Found defective valve during post cylinder change leak testing. Need to order a rebuild kit. If kit is in stock, it should be here by 2:00pm. From eenriquez at snf.stanford.edu Tue May 27 14:44:05 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 27 May 2008 14:44:05 -0700 Subject: Comment epi2 SNF 2008-05-27 14:44:04: HCl update Message-ID: Determined that the low pressure purge valve is leaking. Vendor is trying to find out if the valve is rebuildable. He will have an answer by tomorrow. From eenriquez at snf.stanford.edu Wed May 28 15:58:26 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 28 May 2008 15:58:26 -0700 Subject: Shutdown epi2 SNF 2008-05-26 20:55:52: No HCL/ Repeated Low temp deviation fault/ Repeated chamber overpressure error in ge etch coat recipe Message-ID: Completed HCl cylinder change. Installed a blank-off gasket on the leaky valve. We will replace valve during the next cylinder change. We will investigate the other two reported problems: - Repeated lower temperature deviation faults across recipes - Repeated chamber overpressure error in Ge etch coat recipe From eenriquez at snf.stanford.edu Wed May 28 15:58:52 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 28 May 2008 15:58:52 -0700 Subject: Comment epi2 SNF 2008-05-27 08:53:05: HCl cylinder change problem Message-ID: Noted From eenriquez at snf.stanford.edu Wed May 28 15:59:03 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 28 May 2008 15:59:03 -0700 Subject: Comment epi2 SNF 2008-05-27 14:44:04: HCl update Message-ID: Noted From maurice at snf.stanford.edu Wed May 28 17:51:05 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 28 May 2008 17:51:05 -0700 Subject: Problem epi2 SNF 2008-05-23 20:00:22: low temperature deviation fault Message-ID: Did a Ge etch, 2 big etches and inpected the dome. Looked good. Did a SI etch/coat to coat susceptor. -m From yuhykr at snf.stanford.edu Thu May 29 23:46:32 2008 From: yuhykr at snf.stanford.edu (yuhykr at snf.stanford.edu) Date: Thu, 29 May 2008 23:46:32 -0700 Subject: Problem epi2 SNF 2008-05-29 23:46:31: clean recipe failure Message-ID: Over pressure problem at step 9(Ge etch coat) Tried 5 times all failed... From yuhykr at snf.stanford.edu Thu May 29 23:47:14 2008 From: yuhykr at snf.stanford.edu (yuhykr at snf.stanford.edu) Date: Thu, 29 May 2008 23:47:14 -0700 Subject: Shutdown epi2 SNF 2008-05-29 23:47:13: clean recipe failure always Message-ID: From eenriquez at snf.stanford.edu Fri May 30 08:59:31 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 30 May 2008 08:59:31 -0700 Subject: Comment epi2 SNF 2008-05-30 08:59:30: Update clean recipe fail Message-ID: I believe the over pressure problem in the GE etch-coat recipe is caused two things: unstable DCS flow and poor selection of process control parameter at step #9. At step 9, the DCS flow = 400 sccm and the pressure control parameter = throttle set to 22 deg. With these setting the chamber pressure is greatly dependant on the gas flow and/or the pump performance. I believe the corrective action should be 1) stabilizing the DCS flow 2) controlling chamber pressure by setting the throttle valve to servo to a pressure instead of setting to an angle. To address item 1, we lowered the temperature of the DCS cooling jacket to 10 C from 19 C. This should mitigate any liquid formation in the gas line. To address item 2, I will speak with Maurice about modifying the recipe. From eenriquez at snf.stanford.edu Fri May 30 11:23:24 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 30 May 2008 11:23:24 -0700 Subject: Shutdown epi2 SNF 2008-05-29 23:47:13: clean recipe failure always Message-ID: We will monitor the problem and possibly make changes to the recipe. From eenriquez at snf.stanford.edu Fri May 30 11:23:41 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 30 May 2008 11:23:41 -0700 Subject: Comment epi2 SNF 2008-05-30 08:59:30: Update clean recipe fail Message-ID: Noted From eenriquez at snf.stanford.edu Fri May 30 11:24:31 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 30 May 2008 11:24:31 -0700 Subject: Comment epi2 SNF 2008-05-30 11:24:28: Repaired HCl purge valve Message-ID: Repaired the leaky HCL low pressure purge valve.