May 2008 Archives by thread

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Starting: Thu May 1 06:48:17 PDT 2008
Ending: Fri May 30 11:24:31 PDT 2008
Messages: 51

• Shutdown epi2 SNF 2008-05-01 06:48:17: GE Change   tberg at snf.stanford.edu
  • Shutdown epi2 SNF 2008-05-01 06:48:17: GE Change   tberg at snf.stanford.edu
• Comment epi2 SNF 2008-04-25 06:53:43: GEH4 low   tberg at snf.stanford.edu
• Problem epi2 SNF 2008-05-03 01:39:12: Heat contractor off error   yuhykr at snf.stanford.edu
  • Problem epi2 SNF 2008-05-03 01:39:12: Heat contractor off error   eenriquez at snf.stanford.edu
• Comment epi2 SNF 2008-05-05 10:27:04: Update contactor off   eenriquez at snf.stanford.edu
  • Comment epi2 SNF 2008-05-05 10:27:04: Update contactor off   eenriquez at snf.stanford.edu
• Problem epi2 SNF 2007-10-25 14:38:14: hard drive full   maurice at snf.stanford.edu
• Comment epi2 SNF 2008-03-17 14:23:35: Dome clear   maurice at snf.stanford.edu
• Comment epi2 SNF 2008-03-16 16:21:21: LLA ok to use   maurice at snf.stanford.edu
• Comment epi2 SNF 2007-10-12 15:49:48: Burnbox:sparkplug changed   maurice at snf.stanford.edu
• Comment epi2 SNF 2007-11-06 11:55:31: Update pressure deviation   maurice at snf.stanford.edu
• Comment epi2 SNF 2008-03-24 15:37:29: Inspected dome/looks good   maurice at snf.stanford.edu
• Comment epi2 SNF 2008-04-03 11:11:27: HCL   maurice at snf.stanford.edu
• Problem epi2 SNF 2008-05-12 21:01:59: DCS flow error   rshyam at snf.stanford.edu
  • Problem epi2 SNF 2008-05-12 21:01:59: DCS flow error   maurice at snf.stanford.edu
• Comment epi2 SNF 2008-05-13 14:36:39: dome checked: ok   maurice at snf.stanford.edu
  • Comment epi2 SNF 2008-05-13 14:36:39: dome checked: ok   eenriquez at snf.stanford.edu
• Comment epi2 SNF 2008-04-11 16:55:27: Inspected Dome: Clear   maurice at snf.stanford.edu
• Shutdown epi2 SNF 2008-05-14 15:03:06: temperature cannot go higher than 750   caner at snf.stanford.edu
  • Shutdown epi2 SNF 2008-05-14 15:03:06: temperature cannot go higher than 750   eenriquez at snf.stanford.edu
• Shutdown epi2 SNF 2008-05-15 14:59:30: Ge etch coat recipe problem   eenriquez at snf.stanford.edu
  • Shutdown epi2 SNF 2008-05-15 14:59:30: Ge etch coat recipe problem   maurice at snf.stanford.edu
• Comment epi2 SNF 2008-05-16 09:05:40: Update   eenriquez at snf.stanford.edu
  • Comment epi2 SNF 2008-05-16 09:05:40: Update   maurice at snf.stanford.edu
• Shutdown epi2 SNF 2008-05-16 15:01:13: DCS flow flucuating   maurice at snf.stanford.edu
  • Shutdown epi2 SNF 2008-05-16 15:01:13: DCS flow flucuating   maurice at snf.stanford.edu
• Comment epi2 SNF 2008-05-16 17:38:22: DCS look ok   maurice at snf.stanford.edu
• Problem epi2 SNF 2008-05-16 23:48:25: Chamber A pressure too high   ryw at snf.stanford.edu
  • Problem epi2 SNF 2008-05-16 23:48:25: Chamber A pressure too high   eenriquez at snf.stanford.edu
• Problem epi2 SNF 2008-05-19 01:07:05: Load Lock B stepper failed   slcheng at snf.stanford.edu
  • Problem epi2 SNF 2008-05-19 01:07:05: Load Lock B stepper failed   eenriquez at snf.stanford.edu
• Comment epi2 SNF 2008-05-19 16:55:06: modified etch recipes   maurice at snf.stanford.edu
• Problem epi2 SNF 2008-05-21 08:39:16: DCS Flow Error   skoh at snf.stanford.edu
  • Problem epi2 SNF 2008-05-21 08:39:16: DCS Flow Error   eenriquez at snf.stanford.edu
• Shutdown epi2 SNF 2008-05-21 09:18:47: DCS update   eenriquez at snf.stanford.edu
  • Shutdown epi2 SNF 2008-05-21 09:18:47: DCS update   eenriquez at snf.stanford.edu
• Problem epi2 SNF 2008-05-23 20:00:22: low temperature deviation fault   munehiro at snf.stanford.edu
  • Problem epi2 SNF 2008-05-23 20:00:22: low temperature deviation fault   maurice at snf.stanford.edu
• Shutdown epi2 SNF 2008-05-26 20:55:52: No HCL/ Repeated Low temp deviation fault/ Repeated chamber overpressure error in ge etch coat recipe   rshyam at snf.stanford.edu
  • Shutdown epi2 SNF 2008-05-26 20:55:52: No HCL/ Repeated Low temp deviation fault/ Repeated chamber overpressure error in ge etch coat recipe   eenriquez at snf.stanford.edu
• Comment epi2 SNF 2008-05-27 08:53:05: HCl cylinder change problem   eenriquez at snf.stanford.edu
  • Comment epi2 SNF 2008-05-27 08:53:05: HCl cylinder change problem   eenriquez at snf.stanford.edu
• Comment epi2 SNF 2008-05-27 14:44:04: HCl update   eenriquez at snf.stanford.edu
  • Comment epi2 SNF 2008-05-27 14:44:04: HCl update   eenriquez at snf.stanford.edu
• Problem epi2 SNF 2008-05-29 23:46:31: clean recipe failure   yuhykr at snf.stanford.edu
• Shutdown epi2 SNF 2008-05-29 23:47:13: clean recipe failure always   yuhykr at snf.stanford.edu
  • Shutdown epi2 SNF 2008-05-29 23:47:13: clean recipe failure always   eenriquez at snf.stanford.edu
• Comment epi2 SNF 2008-05-30 08:59:30: Update clean recipe fail   eenriquez at snf.stanford.edu
  • Comment epi2 SNF 2008-05-30 08:59:30: Update clean recipe fail   eenriquez at snf.stanford.edu
• Comment epi2 SNF 2008-05-30 11:24:28: Repaired HCl purge valve   eenriquez at snf.stanford.edu

Last message date: Fri May 30 11:24:31 PDT 2008
Archived on: Sun Dec 23 08:52:48 PST 2012

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