From rshyam at snf.stanford.edu Sun Nov 2 11:33:01 2008 From: rshyam at snf.stanford.edu (rshyam at snf.stanford.edu) Date: Sun, 2 Nov 2008 11:33:01 -0800 Subject: Shutdown epi2 SNF 2008-11-02 11:33:00: Chamber A main scrubber fault - manual gas flows not allowed Message-ID: Fault happened due to lab gases shutdown during toxic gas evacuation From shott at snf.stanford.edu Sun Nov 2 13:34:20 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sun, 2 Nov 2008 13:34:20 -0800 Subject: Shutdown epi2 SNF 2008-11-02 11:33:00: Chamber A main scrubber fault - manual gas flows not allowed Message-ID: The epi2 scrubber had indeed gone down as a result of the TGO MST 30 alarm this morning. When I tried to restart it, however, it seemed to have problems .... the "double reset" only go the temperature up to 120 degrees C before it timed out. Hitting it again got it about 15 degrees higher. Repeating that a number of times finally got it up to about 230 degrees C (the interlock is set at 200) ... but it would still not stay on. So, I powered it down and cleaned the "flame sense" thermocouple. While the manual claims that pulling it out, will remove most of the deposits, I cleaned it more thoroughly with Scotchbrite. I also removed both ignition plugs which also had a certain amount of deposit on them. I'm afraid that I don't know what is normal. I looked for replacement plugs (which I know we have) but couldn't fine them. So, as the next best thing, I covered the "outside part" of the plugs with a rubber glove and bead blasted the "in the line of fire" part of the plug. The inner electrode is almost spherical in shape that leads me to believe that they should be replaced soon. I don't know what our normal plug replacement interval is, but I think that we should review the frequency with which we clean the thermocouple and replace the plugs. Also, looking into the main burn chamber, there is quite a bit of deposit. I believe that it would be wise to carefully take that apart during the shutdown and clean it .... with the normal precautions in handling scrubber parts that are prone to spontaneously flash or ignite. In any event, after cleaning the thermocouple and the plugs, the restart went much better .... it was up to an indicated flame temperature of about 360C within about 2 minutes and has stayed ignited. As a result, I'm removing the shutdown on epi2. Thanks, John From maurice at snf.stanford.edu Tue Nov 4 10:58:00 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 4 Nov 2008 10:58:00 -0800 Subject: Comment epi2 SNF 2008-11-04 10:58:00: dome clear Message-ID: From eenriquez at snf.stanford.edu Tue Nov 4 14:22:18 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 4 Nov 2008 14:22:18 -0800 Subject: Comment epi2 SNF 2008-11-04 14:22:17: New susceptors are here Message-ID: The susceptors that Ted ordered has arrived. From maurice at snf.stanford.edu Tue Nov 4 15:03:19 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 4 Nov 2008 15:03:19 -0800 Subject: Problem epi2 SNF 2008-10-13 09:21:10: 1%ph/Phos bottle is empty Message-ID: Ray says the 1% Phos has past leakcheck and is online! From maurice at snf.stanford.edu Wed Nov 5 14:52:09 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 5 Nov 2008 14:52:09 -0800 Subject: Comment epi2 SNF 2008-11-05 14:52:09: dome inspected Message-ID: clear From slcheng at snf.stanford.edu Wed Nov 5 18:09:36 2008 From: slcheng at snf.stanford.edu (slcheng at snf.stanford.edu) Date: Wed, 5 Nov 2008 18:09:36 -0800 Subject: Shutdown epi2 SNF 2008-11-05 18:09:35: bulb failed Message-ID: Elmer said he will instore new bulbs tomorrow probably. From eenriquez at snf.stanford.edu Thu Nov 6 10:23:03 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 6 Nov 2008 10:23:03 -0800 Subject: Shutdown epi2 SNF 2008-11-05 18:09:35: bulb failed Message-ID: Replaced 4 heater lamps. Ran Big Etch recipe. Ordered more lamps to replace the remaining old bulbs. From eenriquez at snf.stanford.edu Tue Nov 11 06:35:43 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 11 Nov 2008 06:35:43 -0800 Subject: Shutdown epi2 SNF 2008-11-11 06:35:42: Installing new susceptor Message-ID: From eenriquez at snf.stanford.edu Tue Nov 11 09:00:12 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 11 Nov 2008 09:00:12 -0800 Subject: Shutdown epi2 SNF 2008-11-11 06:35:42: Installing new susceptor Message-ID: Installed new susceptor and replaced susceptor support pins. Ran the Big Etch recipe 2X with no problems. From eenriquez at snf.stanford.edu Tue Nov 11 09:01:05 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 11 Nov 2008 09:01:05 -0800 Subject: Comment epi2 SNF 2008-11-11 09:01:02: Needs process qual Message-ID: Installed new susceptor and support pins. From maurice at snf.stanford.edu Tue Nov 11 09:48:17 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 11 Nov 2008 09:48:17 -0800 Subject: Comment epi2 SNF 2008-11-11 09:48:16: testing after susceptor replaced Message-ID: From maurice at snf.stanford.edu Tue Nov 11 11:36:12 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 11 Nov 2008 11:36:12 -0800 Subject: Comment epi2 SNF 2008-11-11 09:48:16: testing after susceptor replaced Message-ID: Elmer changed the susceptor this morning. He then purged it and ran two big etches. I have done three silicon depositions (with big etches in between). We inspected the wafers and they are free of haze. From maurice at snf.stanford.edu Tue Nov 11 11:36:33 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 11 Nov 2008 11:36:33 -0800 Subject: Comment epi2 SNF 2008-11-11 09:01:02: Needs process qual Message-ID: Elmer changed the susceptor this morning. He then purged it and ran two big etches. I have done three silicon depositions (with big etches in between). We inspected the wafers and they are free of haze. From maurice at snf.stanford.edu Tue Nov 11 11:36:55 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 11 Nov 2008 11:36:55 -0800 Subject: Comment epi2 SNF 2008-10-17 14:09:54: dome clear Message-ID: logged From maurice at snf.stanford.edu Tue Nov 11 11:37:03 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 11 Nov 2008 11:37:03 -0800 Subject: Comment epi2 SNF 2008-10-20 09:41:55: dome clear Message-ID: logged From skoh at snf.stanford.edu Wed Nov 12 16:12:04 2008 From: skoh at snf.stanford.edu (skoh at snf.stanford.edu) Date: Wed, 12 Nov 2008 16:12:04 -0800 Subject: Problem epi2 SNF 2008-11-12 16:12:04: Chamber pressure Message-ID: After the recipe is finished on the wafer, system is unable to equalize chamber A pressure with the transfer chamber pressure (80 torr) causing a pressure setpoint deviation fault and causing chamber A to go into isolated. From masaharu at snf.stanford.edu Thu Nov 13 00:10:58 2008 From: masaharu at snf.stanford.edu (masaharu at snf.stanford.edu) Date: Thu, 13 Nov 2008 00:10:58 -0800 Subject: Shutdown epi2 SNF 2008-11-13 00:10:57: Bulb broken Message-ID: I saw bulb failure error. Bulb is broken. From eenriquez at snf.stanford.edu Fri Nov 14 06:55:14 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 14 Nov 2008 06:55:14 -0800 Subject: Comment epi2 SNF 2008-11-14 06:55:13: Update bulb failure Message-ID: Field service will here this morning to replace heater lamps. The system should be ready by 2 pm. From eenriquez at snf.stanford.edu Mon Nov 17 06:46:41 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 17 Nov 2008 06:46:41 -0800 Subject: Comment epi2 SNF 2008-11-14 06:55:13: Update bulb failure Message-ID: Field service was unable to make it because of an emergency. From eenriquez at snf.stanford.edu Mon Nov 17 06:47:39 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 17 Nov 2008 06:47:39 -0800 Subject: Comment epi2 SNF 2008-11-17 06:47:38: Update lamps Message-ID: Field service will be in before noon today. From maurice at snf.stanford.edu Mon Nov 17 18:02:56 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 17 Nov 2008 18:02:56 -0800 Subject: Shutdown epi2 SNF 2008-11-13 00:10:57: Bulb broken Message-ID: Sean for AMAT replaced lamps from bottom housing. System has been etched and coated. Watch your recipes during heat up steps...it may heat up faster now. From maurice at snf.stanford.edu Mon Nov 17 18:03:09 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 17 Nov 2008 18:03:09 -0800 Subject: Comment epi2 SNF 2008-11-17 06:47:38: Update lamps Message-ID: Sean for AMAT replaced lamps from bottom housing. From maurice at snf.stanford.edu Mon Nov 17 18:03:26 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 17 Nov 2008 18:03:26 -0800 Subject: Comment epi2 SNF 2008-11-05 14:52:09: dome inspected Message-ID: logged From maurice at snf.stanford.edu Mon Nov 17 18:03:39 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 17 Nov 2008 18:03:39 -0800 Subject: Comment epi2 SNF 2008-10-22 10:21:44: dome clear Message-ID: archive From rshyam at snf.stanford.edu Tue Nov 18 01:21:23 2008 From: rshyam at snf.stanford.edu (rshyam at snf.stanford.edu) Date: Tue, 18 Nov 2008 01:21:23 -0800 Subject: Shutdown epi2 SNF 2008-11-18 01:21:23: Bulb failed Message-ID: "Chamber A bulb failed in lower outer zone" From eenriquez at snf.stanford.edu Wed Nov 19 14:39:46 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 19 Nov 2008 14:39:46 -0800 Subject: Shutdown epi2 SNF 2008-11-18 01:21:23: Bulb failed Message-ID: Replaced 3 heater lamps ran Big Etch with no problems. From skoh at snf.stanford.edu Thu Nov 20 22:30:40 2008 From: skoh at snf.stanford.edu (skoh at snf.stanford.edu) Date: Thu, 20 Nov 2008 22:30:40 -0800 Subject: Shutdown epi2 SNF 2008-11-20 22:30:39: Bulb failed in Lower Inner Zone Message-ID: Had pressure setpoint deviation fault in step 8 of Ge etchcoat program. Followed by bulb failed in lower inner zone error. Left chamber in isolated. From eenriquez at snf.stanford.edu Fri Nov 21 14:36:47 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 21 Nov 2008 14:36:47 -0800 Subject: Shutdown epi2 SNF 2008-11-21 14:36:46: Pressure problem Message-ID: Throttle valve does not fully close. From eenriquez at snf.stanford.edu Mon Nov 24 09:55:38 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 24 Nov 2008 09:55:38 -0800 Subject: Shutdown epi2 SNF 2008-11-21 14:36:46: Pressure problem Message-ID: Cleaned the throttle valve. Ran the Big Etch and Etchcoat Ch.A recipe with no problems. From eenriquez at snf.stanford.edu Mon Nov 24 09:58:02 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 24 Nov 2008 09:58:02 -0800 Subject: Shutdown epi2 SNF 2008-11-20 22:30:39: Bulb failed in Lower Inner Zone Message-ID: heater lamps were OK. We believe the lamp failure alarm occurs as a result of the pressure faults. From ofidaner at snf.stanford.edu Mon Nov 24 13:10:21 2008 From: ofidaner at snf.stanford.edu (ofidaner at snf.stanford.edu) Date: Mon, 24 Nov 2008 13:10:21 -0800 Subject: Shutdown epi2 SNF 2008-11-24 13:10:21: wafer dropped in the system Message-ID: It is still in ChA probably, but can't take it out. From eenriquez at snf.stanford.edu Mon Nov 24 14:37:38 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 24 Nov 2008 14:37:38 -0800 Subject: Comment epi2 SNF 2008-11-24 14:37:38: Update wafer dropping Message-ID: One of the wafer lift pins is not going down. Suspect a problem with the susceptor support quarts. Will continue purging the chamber tonight and opening the chamber tomorrow. From eenriquez at snf.stanford.edu Tue Nov 25 14:16:51 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 25 Nov 2008 14:16:51 -0800 Subject: Shutdown epi2 SNF 2008-11-24 13:10:21: wafer dropped in the system Message-ID: Replaced broken susceptor support pins. From eenriquez at snf.stanford.edu Tue Nov 25 14:17:09 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 25 Nov 2008 14:17:09 -0800 Subject: Comment epi2 SNF 2008-11-24 14:37:38: Update wafer dropping Message-ID: Replaced susceptor support pins. From eenriquez at snf.stanford.edu Tue Nov 25 14:17:20 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 25 Nov 2008 14:17:20 -0800 Subject: Comment epi2 SNF 2008-11-04 14:22:17: New susceptors are here Message-ID: Archived