Comment epi2 SNF 2008-11-04 10:58:00: dome clear
maurice at snf.stanford.edu
maurice at snf.stanford.edu
Tue Nov 4 10:58:00 PST 2008
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Shutdown epi2 SNF 2008-11-02 11:33:00: Chamber A main scrubber fault - manual gas flows not allowed
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Comment epi2 SNF 2008-11-04 14:22:17: New susceptors are here
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Shutdown epi2 SNF 2008-11-02 11:33:00: Chamber A main scrubber fault - manual gas flows not allowed
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Comment epi2 SNF 2008-11-04 14:22:17: New susceptors are here
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