Shutdown epi2 SNF 2008-11-05 18:09:35: bulb failed
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Thu Nov 6 10:23:03 PST 2008
Replaced 4 heater lamps. Ran Big Etch recipe. Ordered more lamps to replace the remaining old bulbs.
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