Comment epi2 SNF 2008-11-11 09:48:16: testing after susceptor replaced

maurice at snf.stanford.edu maurice at snf.stanford.edu
Tue Nov 11 11:36:12 PST 2008


Elmer changed the susceptor this morning.  He then purged it and ran  two big etches. 
I have done three silicon depositions (with big etches in between).  We inspected the wafers and they are free of haze.




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