Problem epi2 SNF 2008-11-12 16:12:04: Chamber pressure

skoh at snf.stanford.edu skoh at snf.stanford.edu
Wed Nov 12 16:12:04 PST 2008


After the recipe is finished on the wafer, system is unable to equalize chamber A pressure with the transfer chamber pressure (80 torr) causing a pressure setpoint deviation fault and causing chamber A to go into isolated.  




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