Shutdown epi2 SNF 2008-11-13 00:10:57: Bulb broken

maurice at snf.stanford.edu maurice at snf.stanford.edu
Mon Nov 17 18:02:56 PST 2008


Sean for AMAT replaced lamps from bottom housing.
System has been etched and coated.
Watch your recipes during heat up steps...it may heat up faster now.




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