Shutdown epi2 SNF 2008-11-20 22:30:39: Bulb failed in Lower Inner Zone

skoh at snf.stanford.edu skoh at snf.stanford.edu
Thu Nov 20 22:30:40 PST 2008


Had pressure setpoint deviation fault in step 8 of Ge etchcoat program.  Followed by bulb failed in lower inner zone error.  Left chamber in isolated.




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