Comment epi2 SNF 2008-11-24 14:37:38: Update wafer dropping

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Nov 24 14:37:38 PST 2008


One of the wafer lift pins is not going down.  Suspect a problem with the susceptor support quarts.  Will continue purging the chamber tonight and opening the chamber tomorrow.




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