Comment epi2 SNF 2008-11-24 14:37:38: Update wafer dropping

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Nov 24 14:37:38 PST 2008

Previous message: Shutdown epi2 SNF 2008-11-24 13:10:21: wafer dropped in the system
Next message: Comment epi2 SNF 2008-11-24 14:37:38: Update wafer dropping
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

One of the wafer lift pins is not going down.  Suspect a problem with the susceptor support quarts.  Will continue purging the chamber tonight and opening the chamber tomorrow.

Previous message: Shutdown epi2 SNF 2008-11-24 13:10:21: wafer dropped in the system
Next message: Comment epi2 SNF 2008-11-24 14:37:38: Update wafer dropping
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the epi2-pcs mailing list