Shutdown epi2 SNF 2008-11-24 13:10:21: wafer dropped in the system
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Tue Nov 25 14:16:51 PST 2008
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Shutdown epi2 SNF 2008-11-24 13:10:21: wafer dropped in the system
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Comment epi2 SNF 2008-11-24 14:37:38: Update wafer dropping
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Replaced broken susceptor support pins.
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Shutdown epi2 SNF 2008-11-24 13:10:21: wafer dropped in the system
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Comment epi2 SNF 2008-11-24 14:37:38: Update wafer dropping
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