From eenriquez at snf.stanford.edu Wed Oct 1 16:54:59 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 1 Oct 2008 16:54:59 -0700 Subject: Comment epi2 SNF 2008-09-30 14:57:40: Update LL pump Message-ID: Archived From eenriquez at snf.stanford.edu Wed Oct 1 16:56:45 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 1 Oct 2008 16:56:45 -0700 Subject: Comment epi2 SNF 2008-10-01 16:56:45: Update LL pump Message-ID: Just received new LL pump. We will install tomorrow morning. System should be up by noon. From eenriquez at snf.stanford.edu Wed Oct 1 18:41:51 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 1 Oct 2008 18:41:51 -0700 Subject: Comment epi2 SNF 2008-10-01 18:41:50: Update Message-ID: Installed new LL pump. Need to test tomorrow. From eenriquez at snf.stanford.edu Thu Oct 2 08:48:09 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 2 Oct 2008 08:48:09 -0700 Subject: Comment epi2 SNF 2008-10-01 16:56:45: Update LL pump Message-ID: New load lock pump installed. Chamber is now in Hot idle, ready for test. From eenriquez at snf.stanford.edu Thu Oct 2 08:48:15 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 2 Oct 2008 08:48:15 -0700 Subject: Comment epi2 SNF 2008-10-01 18:41:50: Update Message-ID: New load lock pump installed. Chamber is now in Hot idle, ready for test. From eenriquez at snf.stanford.edu Thu Oct 2 08:48:33 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 2 Oct 2008 08:48:33 -0700 Subject: Shutdown epi2 SNF 2008-09-29 15:28:07: LL pump problem Message-ID: New load lock pump installed. Chamber is now in Hot idle, ready for test. From eenriquez at snf.stanford.edu Thu Oct 2 08:48:47 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 2 Oct 2008 08:48:47 -0700 Subject: Comment epi2 SNF 2008-09-29 15:20:43: LL pump Message-ID: New load lock pump installed. Chamber is now in Hot idle, ready for test. From eenriquez at snf.stanford.edu Thu Oct 2 08:50:04 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 2 Oct 2008 08:50:04 -0700 Subject: Shutdown epi2 SNF 2008-10-02 08:50:03: Need to run test Message-ID: From maurice at snf.stanford.edu Thu Oct 2 11:15:46 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 2 Oct 2008 11:15:46 -0700 Subject: Shutdown epi2 SNF 2008-10-02 08:50:03: Need to run test Message-ID: Cycled wafers in and out of the loadlock. Ran SiGe750 recipe. looks ok From maurice at snf.stanford.edu Thu Oct 2 11:16:11 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 2 Oct 2008 11:16:11 -0700 Subject: Problem epi2 SNF 2008-09-08 17:41:46: Hazy wafers Message-ID: Archived From maurice at snf.stanford.edu Thu Oct 2 11:17:43 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 2 Oct 2008 11:17:43 -0700 Subject: Problem epi2 SNF 2008-08-10 13:51:41: LL B door Message-ID: Door working now. Logic could have been reset when system was powered down to pull LL pump. From maurice at snf.stanford.edu Thu Oct 2 11:19:20 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 2 Oct 2008 11:19:20 -0700 Subject: Problem epi2 SNF 2008-08-10 23:17:47: Wafer handling Message-ID: both doors are working normally after system powered down From rshyam at snf.stanford.edu Fri Oct 3 22:17:45 2008 From: rshyam at snf.stanford.edu (rshyam at snf.stanford.edu) Date: Fri, 3 Oct 2008 22:17:45 -0700 Subject: Problem epi2 SNF 2008-10-03 22:17:44: Chamber pressure equalization error Message-ID: Every few wafers, after the recipe is finished on the wafer, system is unable to equalize chamber A pressure with the transfer chamber pressure (80 torr) Has been happening since last weekend... From rshyam at snf.stanford.edu Fri Oct 3 22:21:45 2008 From: rshyam at snf.stanford.edu (rshyam at snf.stanford.edu) Date: Fri, 3 Oct 2008 22:21:45 -0700 Subject: Problem epi2 SNF 2008-10-03 22:21:45: SiH4 not listed in list of gases Message-ID: In recipes, SiH4 is not available as an option in the list of gases. Existing recipes containing SiH4 still have it though. Today found it in condition with SiH4 flowing to vent irrespective of whether recipe running or not. I managed to turn that off. I think SiH4 was flowing to vent even yesterday. I didnt really notice it but vaguely remember seeing it. From slcheng at snf.stanford.edu Sat Oct 4 17:45:13 2008 From: slcheng at snf.stanford.edu (slcheng at snf.stanford.edu) Date: Sat, 4 Oct 2008 17:45:13 -0700 Subject: Problem epi2 SNF 2008-10-04 17:45:12: overtemped failure Message-ID: There is an overtemped failure in the Ge etch process at the end of Onur's process. I don't know how to make it back to inert idle. From rshyam at snf.stanford.edu Sat Oct 4 18:21:01 2008 From: rshyam at snf.stanford.edu (rshyam at snf.stanford.edu) Date: Sat, 4 Oct 2008 18:21:01 -0700 Subject: Shutdown epi2 SNF 2008-10-04 18:21:00: see slcheng's problem report Message-ID: From ofidaner at snf.stanford.edu Sun Oct 5 20:55:57 2008 From: ofidaner at snf.stanford.edu (ofidaner at snf.stanford.edu) Date: Sun, 5 Oct 2008 20:55:57 -0700 Subject: Comment epi2 SNF 2008-10-05 20:55:57: about the overtemp Message-ID: Note that the problem did not occur during my recipe, but at the end of the ETCHCOAT recipe. From eenriquez at snf.stanford.edu Mon Oct 6 09:42:13 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 6 Oct 2008 09:42:13 -0700 Subject: Comment epi2 SNF 2008-10-06 09:42:13: Update overtemp Message-ID: Reset the lamp housing over temperature safety switch. Found the dome is heavily encrusted with deposition. Unable to run an HCl clean since the dome now is opaque. Will purge the chamber for 24 hours before opening. Will assess the damage to the chamber components tomorrow. From eenriquez at snf.stanford.edu Tue Oct 7 10:10:51 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 7 Oct 2008 10:10:51 -0700 Subject: Comment epi2 SNF 2008-10-06 09:42:13: Update overtemp Message-ID: Replaced the dome. Chamber is heavily coated but is otherwise in good condition. Ran one Big-Etch clean with no problems. Maurice will run a test to verify the clean recipe. From eenriquez at snf.stanford.edu Tue Oct 7 10:11:16 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 7 Oct 2008 10:11:16 -0700 Subject: Comment epi2 SNF 2008-10-05 20:55:57: about the overtemp Message-ID: Archived From eenriquez at snf.stanford.edu Tue Oct 7 10:11:37 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 7 Oct 2008 10:11:37 -0700 Subject: Problem epi2 SNF 2008-10-04 17:45:12: overtemped failure Message-ID: Replaced the dome. Chamber is heavily coated but is otherwise in good condition. Ran one Big-Etch clean with no problems. Maurice will run a test to verify the clean recipe. From eenriquez at snf.stanford.edu Tue Oct 7 10:12:43 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 7 Oct 2008 10:12:43 -0700 Subject: Comment epi2 SNF 2008-10-07 10:12:42: Update Message-ID: Replaced the dome. Chamber is heavily coated but is otherwise in good condition. Ran one Big-Etch clean with no problems. Maurice will run a test to verify the clean recipe. From maurice at snf.stanford.edu Tue Oct 7 15:04:41 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 7 Oct 2008 15:04:41 -0700 Subject: Comment epi2 SNF 2008-10-07 10:12:42: Update Message-ID: Deposited 4um on the chamber and used the standard Si "ethchcoat" recipe after. We inspected the dome after...it was clean. - We have reserved the system everyday at 9:30am to do a dome inspection. From maurice at snf.stanford.edu Tue Oct 7 15:05:12 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 7 Oct 2008 15:05:12 -0700 Subject: Shutdown epi2 SNF 2008-10-04 18:21:00: see slcheng's problem report Message-ID: replaced dome From maurice at snf.stanford.edu Tue Oct 7 15:06:35 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 7 Oct 2008 15:06:35 -0700 Subject: Problem epi2 SNF 2008-08-29 15:30:42: weird dep. on wafers Message-ID: dome replaced From maurice at snf.stanford.edu Wed Oct 8 10:18:17 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 8 Oct 2008 10:18:17 -0700 Subject: Comment epi2 SNF 2008-10-08 10:18:16: 10/8/08 dome inspected Message-ID: clear From maurice at snf.stanford.edu Wed Oct 8 10:20:26 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 8 Oct 2008 10:20:26 -0700 Subject: Problem epi2 SNF 2008-10-03 22:21:45: SiH4 not listed in list of gases Message-ID: powered down system. after powering up, SiH4 option returned to program menu - we will check if SiH4 continues to vent when there is no setpoint From maurice at snf.stanford.edu Wed Oct 8 10:20:43 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 8 Oct 2008 10:20:43 -0700 Subject: Comment epi2 SNF 2008-09-08 16:06:44: testing after replacing pins/pump Message-ID: archive From slcheng at snf.stanford.edu Wed Oct 8 19:52:25 2008 From: slcheng at snf.stanford.edu (slcheng at snf.stanford.edu) Date: Wed, 8 Oct 2008 19:52:25 -0700 Subject: Shutdown epi2 SNF 2008-10-08 19:52:22: bulb failed in UPPER OUTER zone Message-ID: This message showed up when it was running the Ge Etch Coat at the end of Onur's process. It went to Cold Idel mode and cannot be broght back to Active Idle afterward. The same faiult message showed up again during the heating from Hot to Active Idle. I tried two more times and got the same result. From mdickey at snf.stanford.edu Thu Oct 9 07:27:37 2008 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 9 Oct 2008 07:27:37 -0700 Subject: Comment epi2 SNF 2008-10-09 07:27:37: Gas empty Message-ID: the 1%ph/Silane bottle is empty. One has been ordered and a delivery date has been requested but there is no answer at this time From eenriquez at snf.stanford.edu Thu Oct 9 14:39:31 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 9 Oct 2008 14:39:31 -0700 Subject: Comment epi2 SNF 2008-10-09 14:39:30: Update bulb failure Message-ID: Found 4 burned out bulbs. Will complete bulb replacement tomorrow by noon. From eenriquez at snf.stanford.edu Fri Oct 10 10:23:34 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 10 Oct 2008 10:23:34 -0700 Subject: Shutdown epi2 SNF 2008-10-08 19:52:22: bulb failed in UPPER OUTER zone Message-ID: Completed heater bulb replacement. Ran Big Etch. From eenriquez at snf.stanford.edu Fri Oct 10 10:23:39 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 10 Oct 2008 10:23:39 -0700 Subject: Comment epi2 SNF 2008-10-09 14:39:30: Update bulb failure Message-ID: Completed heater bulb replacement. Ran Big Etch. From maurice at snf.stanford.edu Fri Oct 10 15:11:40 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 10 Oct 2008 15:11:40 -0700 Subject: Comment epi2 SNF 2008-10-10 15:11:39: 10/10/08 dome inspected Message-ID: dome clean From slcheng at snf.stanford.edu Fri Oct 10 23:06:26 2008 From: slcheng at snf.stanford.edu (slcheng at snf.stanford.edu) Date: Fri, 10 Oct 2008 23:06:26 -0700 Subject: Problem epi2 SNF 2008-10-10 23:06:26: DOP 1 devaition failure Message-ID: The DOP1 gas was running low and caused a fauilure during the deposition. It's in the isolated mode right now and i don't know how to take the wafer out. The RESET+ONLINE doesn't work this time. I think if someone know how to maunally pump down the chamber, we will be able to take it out. Sorry for the problem. From maurice at snf.stanford.edu Mon Oct 13 09:21:10 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 13 Oct 2008 09:21:10 -0700 Subject: Problem epi2 SNF 2008-10-13 09:21:10: 1%ph/Phos bottle is empty Message-ID: the 1%ph/Phos bottle is empty. One has been ordered and a delivery date has been requested but there is no answer at this time From maurice at snf.stanford.edu Mon Oct 13 09:21:41 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 13 Oct 2008 09:21:41 -0700 Subject: Comment epi2 SNF 2008-10-09 07:27:37: Gas empty Message-ID: 1% phos...on order From maurice at snf.stanford.edu Mon Oct 13 14:51:29 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 13 Oct 2008 14:51:29 -0700 Subject: Comment epi2 SNF 2008-10-13 14:51:29: 10/13 dome inspected..ok Message-ID: From skoh at snf.stanford.edu Tue Oct 14 00:51:07 2008 From: skoh at snf.stanford.edu (skoh at snf.stanford.edu) Date: Tue, 14 Oct 2008 00:51:07 -0700 Subject: Problem epi2 SNF 2008-10-14 00:51:06: Chamber pressure equalization error Message-ID: Had same problem as rshyam reported 10/03. Chamber went into isolated. From skoh at snf.stanford.edu Tue Oct 14 00:53:38 2008 From: skoh at snf.stanford.edu (skoh at snf.stanford.edu) Date: Tue, 14 Oct 2008 00:53:38 -0700 Subject: Comment epi2 SNF 2008-10-14 00:53:37: Pressure Deviation Faults Message-ID: Had multiple pressure deviation faults with recipes that worked fine in late September. Had to alter recipe steps to avoid the error. From skoh at snf.stanford.edu Tue Oct 14 00:56:02 2008 From: skoh at snf.stanford.edu (skoh at snf.stanford.edu) Date: Tue, 14 Oct 2008 00:56:02 -0700 Subject: Comment epi2 SNF 2008-10-14 00:56:02: No more log sheets Message-ID: From eenriquez at snf.stanford.edu Tue Oct 14 09:13:41 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 14 Oct 2008 09:13:41 -0700 Subject: Comment epi2 SNF 2008-10-14 09:13:40: Update press deviation Message-ID: Homed and re-calibrated the throttle valve. If pressure faults re-occur, will clean and rebuild the throttle valve tomorrow. From maurice at snf.stanford.edu Tue Oct 14 10:12:00 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 14 Oct 2008 10:12:00 -0700 Subject: Comment epi2 SNF 2008-10-14 10:11:59: dome clear Message-ID: From mdickey at snf.stanford.edu Thu Oct 16 08:16:52 2008 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 16 Oct 2008 08:16:52 -0700 Subject: Comment epi2 SNF 2008-10-16 08:16:51: HCL Message-ID: HCL bottle changed From eenriquez at snf.stanford.edu Thu Oct 16 08:18:11 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 16 Oct 2008 08:18:11 -0700 Subject: Comment epi2 SNF 2008-10-08 10:18:16: 10/8/08 dome inspected Message-ID: Archived From eenriquez at snf.stanford.edu Thu Oct 16 08:18:25 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 16 Oct 2008 08:18:25 -0700 Subject: Comment epi2 SNF 2008-10-10 15:11:39: 10/10/08 dome inspected Message-ID: Archived From eenriquez at snf.stanford.edu Thu Oct 16 08:19:17 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 16 Oct 2008 08:19:17 -0700 Subject: Problem epi2 SNF 2008-10-10 23:06:26: DOP 1 devaition failure Message-ID: Archived From eenriquez at snf.stanford.edu Thu Oct 16 08:19:28 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 16 Oct 2008 08:19:28 -0700 Subject: Comment epi2 SNF 2008-10-13 14:51:29: 10/13 dome inspected..ok Message-ID: Archived From ofidaner at snf.stanford.edu Thu Oct 16 11:50:03 2008 From: ofidaner at snf.stanford.edu (ofidaner at snf.stanford.edu) Date: Thu, 16 Oct 2008 11:50:03 -0700 Subject: Problem epi2 SNF 2008-10-16 11:50:02: overpressure error during Ge Etch Coat Recipe Message-ID: It happened both yesterday and today. From ofidaner at snf.stanford.edu Thu Oct 16 12:13:01 2008 From: ofidaner at snf.stanford.edu (ofidaner at snf.stanford.edu) Date: Thu, 16 Oct 2008 12:13:01 -0700 Subject: Shutdown epi2 SNF 2008-10-16 12:13:00: cannot bring ChA back online Message-ID: From eenriquez at snf.stanford.edu Thu Oct 16 12:39:34 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 16 Oct 2008 12:39:34 -0700 Subject: Shutdown epi2 SNF 2008-10-16 12:13:00: cannot bring ChA back online Message-ID: Brought Ch.A back online. Now in Hot Idle mode. User's wafers are in the LL. Wafers 4 and 5 are unprocessed. From eenriquez at snf.stanford.edu Thu Oct 16 12:41:05 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 16 Oct 2008 12:41:05 -0700 Subject: Comment epi2 SNF 2008-10-16 12:41:01: Update overpressure Message-ID: Homed and calibrated the throttle valve. Will clean and rebuild the valve tomorrow. From eenriquez at snf.stanford.edu Fri Oct 17 09:58:02 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 17 Oct 2008 09:58:02 -0700 Subject: Shutdown epi2 SNF 2008-10-17 09:58:01: Throttle valve maintenance Message-ID: From eenriquez at snf.stanford.edu Fri Oct 17 11:22:02 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 17 Oct 2008 11:22:02 -0700 Subject: Shutdown epi2 SNF 2008-10-17 09:58:01: Throttle valve maintenance Message-ID: Completed throttle valve clean. Also clean a portion of the pumping line. Calibrated the throttle valve and ran the Big Etch recipe with no problems. From eenriquez at snf.stanford.edu Fri Oct 17 11:22:18 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 17 Oct 2008 11:22:18 -0700 Subject: Comment epi2 SNF 2008-10-16 12:41:01: Update overpressure Message-ID: Archived From eenriquez at snf.stanford.edu Fri Oct 17 11:26:30 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 17 Oct 2008 11:26:30 -0700 Subject: Problem epi2 SNF 2008-10-16 11:50:02: overpressure error during Ge Etch Coat Recipe Message-ID: Completed throttle valve clean. Also clean a portion of the pumping line. Calibrated the throttle valve and ran the Big Etch recipe with no problems. From ofidaner at snf.stanford.edu Fri Oct 17 12:48:20 2008 From: ofidaner at snf.stanford.edu (ofidaner at snf.stanford.edu) Date: Fri, 17 Oct 2008 12:48:20 -0700 Subject: Shutdown epi2 SNF 2008-10-17 12:48:19: overpressure error during big etch Message-ID: From eenriquez at snf.stanford.edu Fri Oct 17 13:28:28 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 17 Oct 2008 13:28:28 -0700 Subject: Shutdown epi2 SNF 2008-10-17 12:48:19: overpressure error during big etch Message-ID: Adjusted the throttle valve PID at 600 Torr. Ran the Big Etch recipe with no problem. Chamber intermittently has a difficult time controlling pressure around 600 Torr. Might still need to optimize the pressure control response. From maurice at snf.stanford.edu Fri Oct 17 14:09:55 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 17 Oct 2008 14:09:55 -0700 Subject: Comment epi2 SNF 2008-10-17 14:09:54: dome clear Message-ID: Dome clear suspecter need etch center not etched From maurice at snf.stanford.edu Mon Oct 20 09:41:56 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 20 Oct 2008 09:41:56 -0700 Subject: Comment epi2 SNF 2008-10-20 09:41:55: dome clear Message-ID: From eenriquez at snf.stanford.edu Mon Oct 20 10:35:48 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 20 Oct 2008 10:35:48 -0700 Subject: Comment epi2 SNF 2008-10-14 10:11:59: dome clear Message-ID: Archived From maurice at snf.stanford.edu Wed Oct 22 10:21:45 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 22 Oct 2008 10:21:45 -0700 Subject: Comment epi2 SNF 2008-10-22 10:21:44: dome clear Message-ID: From maurice at snf.stanford.edu Thu Oct 23 17:16:09 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 23 Oct 2008 17:16:09 -0700 Subject: Shutdown epi2 SNF 2008-10-23 17:16:08: two pins stuck Message-ID: Two of wafer lift pins are stuck in the up position From maurice at snf.stanford.edu Fri Oct 24 14:16:48 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 24 Oct 2008 14:16:48 -0700 Subject: Shutdown epi2 SNF 2008-10-23 17:16:08: two pins stuck Message-ID: EE replaced quartz pins with silicon carbide pins purged chamber, did a big etch From rshyam at snf.stanford.edu Sat Oct 25 21:52:24 2008 From: rshyam at snf.stanford.edu (rshyam at snf.stanford.edu) Date: Sat, 25 Oct 2008 21:52:24 -0700 Subject: Comment epi2 SNF 2008-10-25 21:52:24: When will LLB come back up? Message-ID: From rshyam at snf.stanford.edu Sun Oct 26 08:19:49 2008 From: rshyam at snf.stanford.edu (rshyam at snf.stanford.edu) Date: Sun, 26 Oct 2008 08:19:49 -0700 Subject: Shutdown epi2 SNF 2008-10-26 08:19:48: 'Chamber A has no air flow' error Message-ID: It gave the above error and came to cold idle. If I try to bring it back up to hot idle, it gives the same error. From mdickey at snf.stanford.edu Mon Oct 27 06:11:39 2008 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 27 Oct 2008 06:11:39 -0700 Subject: Shutdown epi2 SNF 2008-10-26 08:19:48: 'Chamber A has no air flow' error Message-ID: From maurice at snf.stanford.edu Tue Oct 28 15:51:34 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 28 Oct 2008 15:51:34 -0700 Subject: Comment epi2 SNF 2008-10-28 15:51:33: inspected chamber Message-ID: some very deposition on dome ran mega etch (modified mega etch so that has time to heat up without aborting) From maurice at snf.stanford.edu Wed Oct 29 11:43:08 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 29 Oct 2008 11:43:08 -0700 Subject: Comment epi2 SNF 2008-10-29 11:43:08: dome clear Message-ID: From masaharu at snf.stanford.edu Thu Oct 30 13:21:53 2008 From: masaharu at snf.stanford.edu (masaharu at snf.stanford.edu) Date: Thu, 30 Oct 2008 13:21:53 -0700 Subject: Problem epi2 SNF 2008-10-30 13:21:52: Heater contactor off/low water flow Message-ID: I saw heater contactor off and low water flow error. I cannot go to active idle. Elmer said it may be because lamp is broken. So, the system will be down for a while until tomorrow. From maurice at snf.stanford.edu Thu Oct 30 13:39:33 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 30 Oct 2008 13:39:33 -0700 Subject: Shutdown epi2 SNF 2008-10-30 13:39:30: Lamp burned out Message-ID: From eenriquez at snf.stanford.edu Fri Oct 31 09:01:21 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 31 Oct 2008 09:01:21 -0700 Subject: Shutdown epi2 SNF 2008-10-30 13:39:30: Lamp burned out Message-ID: Replaced two burnt out heater lamps. Ran the Big Etch recipe with no problem. From eenriquez at snf.stanford.edu Fri Oct 31 09:01:33 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 31 Oct 2008 09:01:33 -0700 Subject: Problem epi2 SNF 2008-10-30 13:21:52: Heater contactor off/low water flow Message-ID: Replaced two burnt out heater lamps. Ran the Big Etch recipe with no problem. From maurice at snf.stanford.edu Fri Oct 31 10:30:03 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 31 Oct 2008 10:30:03 -0700 Subject: Problem epi2 SNF 2008-06-26 10:20:09: Wafer handling Message-ID: Both load locks working (system power cycled after power outage ...a moth or two ago). From maurice at snf.stanford.edu Fri Oct 31 10:30:36 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 31 Oct 2008 10:30:36 -0700 Subject: Problem epi2 SNF 2008-08-09 09:17:10: Chamber A Overpressure Message-ID: EE cleaned thottle valve From maurice at snf.stanford.edu Fri Oct 31 10:31:09 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 31 Oct 2008 10:31:09 -0700 Subject: Comment epi2 SNF 2008-10-14 00:56:02: No more log sheets Message-ID: I brought in more log sheets From maurice at snf.stanford.edu Fri Oct 31 10:31:27 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 31 Oct 2008 10:31:27 -0700 Subject: Comment epi2 SNF 2008-10-14 09:13:40: Update press deviation Message-ID: logged From maurice at snf.stanford.edu Fri Oct 31 10:31:56 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 31 Oct 2008 10:31:56 -0700 Subject: Problem epi2 SNF 2008-10-03 22:17:44: Chamber pressure equalization error Message-ID: rebuilt throttle valve From maurice at snf.stanford.edu Fri Oct 31 10:32:22 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 31 Oct 2008 10:32:22 -0700 Subject: Problem epi2 SNF 2008-10-14 00:51:06: Chamber pressure equalization error Message-ID: rebuilt throttle valve From maurice at snf.stanford.edu Fri Oct 31 10:32:41 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 31 Oct 2008 10:32:41 -0700 Subject: Comment epi2 SNF 2008-10-14 00:53:37: Pressure Deviation Faults Message-ID: logged From maurice at snf.stanford.edu Fri Oct 31 10:33:04 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 31 Oct 2008 10:33:04 -0700 Subject: Comment epi2 SNF 2008-10-25 21:52:24: When will LLB come back up? Message-ID: LLB is ok From maurice at snf.stanford.edu Fri Oct 31 10:35:48 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 31 Oct 2008 10:35:48 -0700 Subject: Comment epi2 SNF 2008-10-31 10:35:48: dome clear Message-ID: From slcheng at snf.stanford.edu Fri Oct 31 23:16:55 2008 From: slcheng at snf.stanford.edu (slcheng at snf.stanford.edu) Date: Fri, 31 Oct 2008 23:16:55 -0700 Subject: Problem epi2 SNF 2008-10-31 23:16:54: unstable pressure Message-ID: We found this when the process was finished. The pressure in Chamber A cannot be stabalized. it was jumping between 20 to 120 torr under Active idle. It was satble again whe we drop the temperature down at Inert Idle mode.