Problem epi2 SNF 2008-10-03 22:17:44: Chamber pressure equalization error

rshyam at snf.stanford.edu rshyam at snf.stanford.edu
Fri Oct 3 22:17:45 PDT 2008


Every few wafers, after the recipe is finished on the wafer, system is unable to equalize chamber A pressure with the transfer chamber pressure (80 torr)
Has been happening since last weekend...




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