Problem epi2 SNF 2008-10-03 22:21:45: SiH4 not listed in list of gases

rshyam at snf.stanford.edu rshyam at snf.stanford.edu
Fri Oct 3 22:21:45 PDT 2008


In recipes, SiH4 is not available as an option in the list of gases. Existing recipes containing SiH4 still have it though.
Today found it in condition with SiH4 flowing to vent irrespective of whether recipe running or not. I managed to turn that off.
I think SiH4 was flowing to vent even yesterday. I didnt really notice it but vaguely remember seeing it.




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