Problem epi2 SNF 2008-10-04 17:45:12: overtemped failure

slcheng at snf.stanford.edu slcheng at snf.stanford.edu
Sat Oct 4 17:45:13 PDT 2008


There is an overtemped failure in the Ge etch process at the end of Onur's process. I don't know how to make it back to inert idle.




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