Problem epi2 SNF 2008-10-04 17:45:12: overtemped failure

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue Oct 7 10:11:37 PDT 2008


Replaced the dome.  Chamber is heavily coated but is otherwise in good condition.  Ran one Big-Etch clean with no problems.  Maurice will run a test to verify the clean recipe.




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