Comment epi2 SNF 2008-10-07 10:12:42: Update

maurice at snf.stanford.edu maurice at snf.stanford.edu
Tue Oct 7 15:04:41 PDT 2008


Deposited 4um on the chamber and used the standard Si "ethchcoat" recipe after.  We inspected the dome after...it was clean.
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We have reserved the system everyday at 9:30am to do a dome inspection.




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