Shutdown epi2 SNF 2008-10-08 19:52:22: bulb failed in UPPER OUTER zone

slcheng at snf.stanford.edu slcheng at snf.stanford.edu
Wed Oct 8 19:52:25 PDT 2008


This message showed up when it was running the Ge Etch Coat at the end of Onur's process. It went to Cold Idel mode and cannot be broght back to Active Idle afterward. The same faiult message showed up again during the heating from Hot to Active Idle. I tried two more times and got the same result. 




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