Problem epi2 SNF 2008-10-10 23:06:26: DOP 1 devaition failure

slcheng at slcheng at
Fri Oct 10 23:06:26 PDT 2008

The DOP1 gas was running low and caused a fauilure during the deposition. It's in the isolated mode right now and i don't know how to take the wafer out. The RESET+ONLINE doesn't work this time. I think if someone know how to maunally pump down the chamber, we will be able to take it out.
Sorry for the problem.

More information about the epi2-pcs mailing list