Comment epi2 SNF 2008-10-14 00:53:37: Pressure Deviation Faults

skoh at snf.stanford.edu skoh at snf.stanford.edu
Tue Oct 14 00:53:38 PDT 2008


Had multiple pressure deviation faults with recipes that worked fine in late September. Had to alter recipe steps to avoid the error.




More information about the epi2-pcs mailing list