Problem epi2 SNF 2008-10-16 11:50:02: overpressure error during Ge Etch Coat Recipe

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Fri Oct 17 11:26:30 PDT 2008


Completed throttle valve clean.  Also clean a portion of the pumping line.  Calibrated the throttle valve and ran the Big Etch recipe with no problems.




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