Shutdown epi2 SNF 2008-10-17 12:48:19: overpressure error during big etch

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Fri Oct 17 13:28:28 PDT 2008


Adjusted the throttle valve PID at 600 Torr.  Ran the Big Etch recipe with no problem.  
Chamber intermittently has a difficult time controlling pressure around 600 Torr.  Might still need to optimize the pressure control response.




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