Shutdown epi2 SNF 2008-10-26 08:19:48: 'Chamber A has no air flow' error

rshyam at snf.stanford.edu rshyam at snf.stanford.edu
Sun Oct 26 08:19:49 PDT 2008


It gave the above error and came to cold idle. If I try to bring it back up to hot idle, it gives the same error.




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