Problem epi2 SNF 2008-10-03 22:17:44: Chamber pressure equalization error
maurice at snf.stanford.edu
maurice at snf.stanford.edu
Fri Oct 31 10:31:56 PDT 2008
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Problem epi2 SNF 2008-10-03 22:17:44: Chamber pressure equalization error
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Problem epi2 SNF 2008-10-03 22:21:45: SiH4 not listed in list of gases
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rebuilt throttle valve
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Problem epi2 SNF 2008-10-03 22:17:44: Chamber pressure equalization error
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Problem epi2 SNF 2008-10-03 22:21:45: SiH4 not listed in list of gases
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