Problem epi2 SNF 2008-10-31 23:16:54: unstable pressure

slcheng at snf.stanford.edu slcheng at snf.stanford.edu
Fri Oct 31 23:16:55 PDT 2008


We found this when the process was finished. The pressure in Chamber A cannot be stabalized. it was jumping between 20 to 120 torr under Active idle.  It was satble  again whe we drop the temperature down at  Inert Idle mode.  




More information about the epi2-pcs mailing list