October 2008 Archives by author

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Starting: Wed Oct 1 16:54:59 PDT 2008
Ending: Fri Oct 31 23:16:55 PDT 2008
Messages: 83

Comment epi2 SNF 2008-09-30 14:57:40: Update LL pump eenriquez at snf.stanford.edu
Comment epi2 SNF 2008-10-01 16:56:45: Update LL pump eenriquez at snf.stanford.edu
Comment epi2 SNF 2008-10-01 18:41:50: Update eenriquez at snf.stanford.edu
Comment epi2 SNF 2008-10-01 16:56:45: Update LL pump eenriquez at snf.stanford.edu
Comment epi2 SNF 2008-10-01 18:41:50: Update eenriquez at snf.stanford.edu
Shutdown epi2 SNF 2008-09-29 15:28:07: LL pump problem eenriquez at snf.stanford.edu
Comment epi2 SNF 2008-09-29 15:20:43: LL pump eenriquez at snf.stanford.edu
Shutdown epi2 SNF 2008-10-02 08:50:03: Need to run test eenriquez at snf.stanford.edu
Comment epi2 SNF 2008-10-06 09:42:13: Update overtemp eenriquez at snf.stanford.edu
Comment epi2 SNF 2008-10-06 09:42:13: Update overtemp eenriquez at snf.stanford.edu
Comment epi2 SNF 2008-10-05 20:55:57: about the overtemp eenriquez at snf.stanford.edu
Problem epi2 SNF 2008-10-04 17:45:12: overtemped failure eenriquez at snf.stanford.edu
Comment epi2 SNF 2008-10-07 10:12:42: Update eenriquez at snf.stanford.edu
Comment epi2 SNF 2008-10-09 14:39:30: Update bulb failure eenriquez at snf.stanford.edu
Shutdown epi2 SNF 2008-10-08 19:52:22: bulb failed in UPPER OUTER zone eenriquez at snf.stanford.edu
Comment epi2 SNF 2008-10-09 14:39:30: Update bulb failure eenriquez at snf.stanford.edu
Comment epi2 SNF 2008-10-14 09:13:40: Update press deviation eenriquez at snf.stanford.edu
Comment epi2 SNF 2008-10-08 10:18:16: 10/8/08 dome inspected eenriquez at snf.stanford.edu
Comment epi2 SNF 2008-10-10 15:11:39: 10/10/08 dome inspected eenriquez at snf.stanford.edu
Problem epi2 SNF 2008-10-10 23:06:26: DOP 1 devaition failure eenriquez at snf.stanford.edu
Comment epi2 SNF 2008-10-13 14:51:29: 10/13 dome inspected..ok eenriquez at snf.stanford.edu
Shutdown epi2 SNF 2008-10-16 12:13:00: cannot bring ChA back online eenriquez at snf.stanford.edu
Comment epi2 SNF 2008-10-16 12:41:01: Update overpressure eenriquez at snf.stanford.edu
Shutdown epi2 SNF 2008-10-17 09:58:01: Throttle valve maintenance eenriquez at snf.stanford.edu
Shutdown epi2 SNF 2008-10-17 09:58:01: Throttle valve maintenance eenriquez at snf.stanford.edu
Comment epi2 SNF 2008-10-16 12:41:01: Update overpressure eenriquez at snf.stanford.edu
Problem epi2 SNF 2008-10-16 11:50:02: overpressure error during Ge Etch Coat Recipe eenriquez at snf.stanford.edu
Shutdown epi2 SNF 2008-10-17 12:48:19: overpressure error during big etch eenriquez at snf.stanford.edu
Comment epi2 SNF 2008-10-14 10:11:59: dome clear eenriquez at snf.stanford.edu
Shutdown epi2 SNF 2008-10-30 13:39:30: Lamp burned out eenriquez at snf.stanford.edu
Problem epi2 SNF 2008-10-30 13:21:52: Heater contactor off/low water flow eenriquez at snf.stanford.edu
Problem epi2 SNF 2008-10-30 13:21:52: Heater contactor off/low water flow masaharu at snf.stanford.edu
Shutdown epi2 SNF 2008-10-02 08:50:03: Need to run test maurice at snf.stanford.edu
Problem epi2 SNF 2008-09-08 17:41:46: Hazy wafers maurice at snf.stanford.edu
Problem epi2 SNF 2008-08-10 13:51:41: LL B door maurice at snf.stanford.edu
Problem epi2 SNF 2008-08-10 23:17:47: Wafer handling maurice at snf.stanford.edu
Comment epi2 SNF 2008-10-07 10:12:42: Update maurice at snf.stanford.edu
Shutdown epi2 SNF 2008-10-04 18:21:00: see slcheng's problem report maurice at snf.stanford.edu
Problem epi2 SNF 2008-08-29 15:30:42: weird dep. on wafers maurice at snf.stanford.edu
Comment epi2 SNF 2008-10-08 10:18:16: 10/8/08 dome inspected maurice at snf.stanford.edu
Problem epi2 SNF 2008-10-03 22:21:45: SiH4 not listed in list of gases maurice at snf.stanford.edu
Comment epi2 SNF 2008-09-08 16:06:44: testing after replacing pins/pump maurice at snf.stanford.edu
Comment epi2 SNF 2008-10-10 15:11:39: 10/10/08 dome inspected maurice at snf.stanford.edu
Problem epi2 SNF 2008-10-13 09:21:10: 1%ph/Phos bottle is empty maurice at snf.stanford.edu
Comment epi2 SNF 2008-10-09 07:27:37: Gas empty maurice at snf.stanford.edu
Comment epi2 SNF 2008-10-13 14:51:29: 10/13 dome inspected..ok maurice at snf.stanford.edu
Comment epi2 SNF 2008-10-14 10:11:59: dome clear maurice at snf.stanford.edu
Comment epi2 SNF 2008-10-17 14:09:54: dome clear maurice at snf.stanford.edu
Comment epi2 SNF 2008-10-20 09:41:55: dome clear maurice at snf.stanford.edu
Comment epi2 SNF 2008-10-22 10:21:44: dome clear maurice at snf.stanford.edu
Shutdown epi2 SNF 2008-10-23 17:16:08: two pins stuck maurice at snf.stanford.edu
Shutdown epi2 SNF 2008-10-23 17:16:08: two pins stuck maurice at snf.stanford.edu
Comment epi2 SNF 2008-10-28 15:51:33: inspected chamber maurice at snf.stanford.edu
Comment epi2 SNF 2008-10-29 11:43:08: dome clear maurice at snf.stanford.edu
Shutdown epi2 SNF 2008-10-30 13:39:30: Lamp burned out maurice at snf.stanford.edu
Problem epi2 SNF 2008-06-26 10:20:09: Wafer handling maurice at snf.stanford.edu
Problem epi2 SNF 2008-08-09 09:17:10: Chamber A Overpressure maurice at snf.stanford.edu
Comment epi2 SNF 2008-10-14 00:56:02: No more log sheets maurice at snf.stanford.edu
Comment epi2 SNF 2008-10-14 09:13:40: Update press deviation maurice at snf.stanford.edu
Problem epi2 SNF 2008-10-03 22:17:44: Chamber pressure equalization error maurice at snf.stanford.edu
Problem epi2 SNF 2008-10-14 00:51:06: Chamber pressure equalization error maurice at snf.stanford.edu
Comment epi2 SNF 2008-10-14 00:53:37: Pressure Deviation Faults maurice at snf.stanford.edu
Comment epi2 SNF 2008-10-25 21:52:24: When will LLB come back up? maurice at snf.stanford.edu
Comment epi2 SNF 2008-10-31 10:35:48: dome clear maurice at snf.stanford.edu
Comment epi2 SNF 2008-10-09 07:27:37: Gas empty mdickey at snf.stanford.edu
Comment epi2 SNF 2008-10-16 08:16:51: HCL mdickey at snf.stanford.edu
Shutdown epi2 SNF 2008-10-26 08:19:48: 'Chamber A has no air flow' error mdickey at snf.stanford.edu
Comment epi2 SNF 2008-10-05 20:55:57: about the overtemp ofidaner at snf.stanford.edu
Problem epi2 SNF 2008-10-16 11:50:02: overpressure error during Ge Etch Coat Recipe ofidaner at snf.stanford.edu
Shutdown epi2 SNF 2008-10-16 12:13:00: cannot bring ChA back online ofidaner at snf.stanford.edu
Shutdown epi2 SNF 2008-10-17 12:48:19: overpressure error during big etch ofidaner at snf.stanford.edu
Problem epi2 SNF 2008-10-03 22:17:44: Chamber pressure equalization error rshyam at snf.stanford.edu
Problem epi2 SNF 2008-10-03 22:21:45: SiH4 not listed in list of gases rshyam at snf.stanford.edu
Shutdown epi2 SNF 2008-10-04 18:21:00: see slcheng's problem report rshyam at snf.stanford.edu
Comment epi2 SNF 2008-10-25 21:52:24: When will LLB come back up? rshyam at snf.stanford.edu
Shutdown epi2 SNF 2008-10-26 08:19:48: 'Chamber A has no air flow' error rshyam at snf.stanford.edu
Problem epi2 SNF 2008-10-14 00:51:06: Chamber pressure equalization error skoh at snf.stanford.edu
Comment epi2 SNF 2008-10-14 00:53:37: Pressure Deviation Faults skoh at snf.stanford.edu
Comment epi2 SNF 2008-10-14 00:56:02: No more log sheets skoh at snf.stanford.edu
Problem epi2 SNF 2008-10-04 17:45:12: overtemped failure slcheng at snf.stanford.edu
Shutdown epi2 SNF 2008-10-08 19:52:22: bulb failed in UPPER OUTER zone slcheng at snf.stanford.edu
Problem epi2 SNF 2008-10-10 23:06:26: DOP 1 devaition failure slcheng at snf.stanford.edu
Problem epi2 SNF 2008-10-31 23:16:54: unstable pressure slcheng at snf.stanford.edu

Last message date: Fri Oct 31 23:16:55 PDT 2008
Archived on: Sun Dec 23 08:52:50 PST 2012

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